We demonstrate high quality factor (high-Q) air-clad optical microresonator in a thinfilm LPCVD-SiN, with loaded quality factor of 1.55 M at the near visible wavelength, suitable for interaction with Rb atoms for single atom detection. This record is achieved with no chemical mechanical polishing or high-temperature post-processing, enabling future fully integrated devices with optoelectronic circuitry.
We demonstrate wideband flat bright-soliton Kerr-comb in thin-film foundry-compatible SiN platform. This is achieved using multi-segment coupled resonators. Multi-segment coupling with optimized coupling regions allow higher order dispersion engineering, paving the way toward wideband flat Kerr-comb around the pumping frequency. Here, using three coupling regions, we report a design based on thin-film SiN with 3dB spectral coverage of 3.8 THz around the pumping wavelength λ0 = 1550 nm.
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