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Alok Tungal
at Nanoscribe GmbH & Co KG
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Publications (1)
Proceedings Article | 20 May 2022 Presentation
Advancement in two-photon grayscale lithography
Andrea Bertoncini, Yann Tanguy, Alok Tungal, Nicole Lindenmann, Timo Sartor, Roman Reiner, Matthias Blaicher, Sebastian Fisher, Mana Taghdiri, Fabian Niesler, André Radke, Michael Thiel
Proceedings Volume PC12135, PC1213501 (2022) https://doi.org/10.1117/12.2620974
KEYWORDS: Grayscale lithography, Spatial resolution, Nanotechnology, Nanoimprint lithography, Mask making, Lithography
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