Dr. Amnon Manassen Profile

Dr. Amnon Manassen

Advanced Technology at KLA-Tencor Israel

SPIE Involvement:

Author

Publications (2)

Proceedings Article | 26 May 2022 Paper

Overlay challenges in 3D heterogeneous integration

Yoav Grauer, Andy Miller, Douglas Charles La Tulipe, Amnon Manassen, Shlomo Eisenbach, Ohad Bachar, Roel Gronheid

Proceedings Volume 12053, 120530D (2022) https://doi.org/10.1117/12.2608319

KEYWORDS: Semiconducting wafers, Metrology, Wafer bonding, Silicon, 3D metrology, Packaging, Optical alignment

Read Abstract +

Proceedings Article | 30 March 2017 Paper

Process resilient overlay target designs for advanced memory manufacture

Joonseuk Lee, Mirim Jung, Honggoo Lee, Youngsik Kim, Sangjun Han, Michael Adel, Tal Itzkovich, Vladimir Levinski, Victoria Naipak, Anna Golotsvan, Amnon Manassen, Yuri Paskover, Tom Leviant, Efi Megged, Myungjun Lee, Mark Smith, Do-Hwa Lee, DongSub Choi, Zephyr Liu

Proceedings Volume 10145, 1014524 (2017) https://doi.org/10.1117/12.2258376

KEYWORDS: Overlay metrology, Metrology, Lithography, Manufacturing, Semiconducting wafers, Optical lithography, Polarization, Modulation, Critical dimension metrology, Image segmentation

Read Abstract +

View contact details

UPDATE YOUR PROFILE

Is this your profile? Update it now.

Sign into your SPIE.org account

Don’t have a profile and want one?

Create an account on SPIE.org

Keywords/Phrases

Search In:

Publication Years