Dr. Jin An Profile

Dr. Jin An

at Harbin Institute of Technology

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Publications (1)

Proceedings Article | 7 March 2019 Paper

Error analysis of target trajectory tracking applied for measurement of high speed spindle

Jin An, Jiamin Chen, Wenguo Yang, Xinggang Wang, Lei Wang, Jie Lin, Peng Jin, Jiubin Tan

Proceedings Volume 11053, 110530Y (2019) https://doi.org/10.1117/12.2508472

KEYWORDS: Spindles, Error analysis, Motion measurement, Sensors, Motion models, Optical testing, Semiconducting wafers, Charge-coupled devices, Adaptive optics, Capacitance

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