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Anatolii I. Vinogradov
at Moscow Institute of Electronic Technologies
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Publications (1)
Proceedings Article | 26 February 2010 Paper
Optimization of parameters of process deep plasmachemical etching of silicon for elements MEMS
A. Vinogradov, N. Zarjankin, J. Mihajlov, E. Prokopev, S. Timoshenkov
Proceedings Volume 7521, 75210B (2010) https://doi.org/10.1117/12.853837
KEYWORDS: Etching, Silicon, Photomasks, Silica, Microelectromechanical systems, Manufacturing, Chemical elements, Plasma etching, Protactinium, Semiconducting wafers
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