In light-field microscopy, a single point emitter gives rise to a complex diffraction pattern, which varies with the position of the emitter in object space. In order to use deconvolution-based wave-optical reconstruction schemes for light-field imaging systems, established methods rely on theoretical estimation of such diffraction patterns. In this paper we propose a novel method for direct experimental estimation of the light-field point spread function. Our approach relies on a modified reversed micro-Hartmann test to acquire a composite light-field point spread function of several thousand point emitters in the object plane simultaneously. By using fiducial markers and a custom image processing algorithm we separate the contributions of individual point emitters directly in raw light-field images and allow the construction of the forward imaging process without any prior assumption about the optical system required. The constructed forward imaging model can finally be applied in the 3D-deconvolution based wave-optical reconstruction scheme.
In addition to the two-dimensional intensity distribution in the image plane, light field microscopes capture information about the angle of the incident radiation. This information can be used to extract depth information about the object, calculate all-in-focus images and perform three-dimensional reconstructions from a single exposure. In combination with automated microscopy setups, this makes the technique a promising tool for high-throughput, three-dimensional cell assay evaluation which could substantially improve drug development and screening. To this end, we have developed a novel generalized calibration and three-dimensional reconstruction scheme for a lightfield fluorescence microscope setup. The scheme can handle Keplerian and Galilean light field camera configurations added to infinity corrected microscopes configured to be telecentric as well as non-telecentric or hypercentric. The latter provides a significant advantage over the state of the art as it allows for an application specific optimization of lateral and axial resolution, field-of-view, and depth-of-focus. The reconstruction itself is performed iteratively using an expectation maximization algorithm. Super-resolved reconstructions can be achieved by including experimentally measured pointspread- functions. To reduce the required computational power, sparsity and periodicity of the system matrix relating object space to light field space is exploited. This is particularly challenging for the non-telecentric cases, where the voxel size of the reconstructed object space depends on the axial coordinate. We provide details on the experimental setup and the reconstruction algorithm, and present results on the experimental verification of theoretical performance parameters as well as successful reconstructions of fluorescent beads and three-dimensional cell spheroids.
A translatory MOEMS actuator with extraordinarily large stroke - especially developed for fast optical path-length modulation in miniaturized FT-spectrometers (FTS) designed for NIR spectral region (800 nm – 2500 nm) - is presented. A precise translational out-of-plane oscillation at 260 Hz with a stroke of up to 700 μm and minimized dynamic mirror deformation of 80 nm is realized by means of an optimized MEMS design. The MOEMS device is driven electro-statically near resonance and is manufactured in a CMOS-compatible SOI process. Due to the significant viscous gas damping, dominated by the drag resistance of the comparatively large mirror plate with 5mm diameter, the resonant MEMS device has to operate under reduced pressure. A mirror stroke of 700 μm at a driving voltage of 4V is achieved by hermetic encapsulation of the actuator at at a maximal pressure of 3.2 Pa. For FTS system integration the MOEMS actuator has been encapsulated in an optical vacuum wafer-level package (VWLP) to guarantee a long-term stable vacuum pressure of 0.1 Pa and lifetime t ≥ 10a.
A light field camera acquires the intensity and direction of rays from a scene providing a 4D representation L(x,y,u,v) called the light field. The acquired light field allows to virtually change view point and selectively re-focus regions algorithmically, an important feature for many applications in imaging and microscopy. The combination with hyperspectral imaging provides the additional advantage that small objects (beads, cells, nuclei) can be categorised using their spectroscopic signatures. Using an inverse fluorescence microscope, a LCTF tuneable filter and a light field setup as a test-bed, fluorescence-marked beads have been imaged and reconstructed into a 4D hyper-spectral image cube LHSI(x,y,z,λ). The results demonstrate the advantages of the approach for fluorescence microscopy providing extended depth of focus (DoF) and the fidelity of hyper-spectral imaging.
KEYWORDS: Microelectromechanical systems, Spectrometers, Mirrors, Signal to noise ratio, Sensors, FT-IR spectroscopy, Spectral resolution, Near infrared, Packaging, System integration
With a trend towards the use of spectroscopic systems in various fields of science and industry, there is an increasing
demand for compact spectrometers. For UV/VIS to the shortwave near-infrared spectral range, compact hand-held
polychromator type devices are widely used and have replaced larger conventional instruments in many applications.
Still, for longer wavelengths this type of compact spectrometers is lacking suitable and affordable detector arrays. In
perennial development Carinthian Tech Research AG together with the Fraunhofer Institute for Photonic Microsystems
endeavor to close this gap by developing spectrometer systems based on photonic MEMS. Here, we review on two
different spectrometer developments, a scanning grating spectrometer working in the NIR and a FT-spectrometer
accessing the mid-IR range up to 14 μm. Both systems are using photonic MEMS devices actuated by in-plane comb
drive structures. This principle allows for high mechanical amplitudes at low driving voltages but results in gratings
respectively mirrors oscillating harmonically. Both systems feature special MEMS structures as well as aspects in terms
of system integration which shall tease out the best possible overall performance on the basis of this technology.
However, the advantages of MEMS as enabling technology for high scanning speed, miniaturization, energy efficiency,
etc. are pointed out. Whereas the scanning grating spectrometer has already evolved to a product for the point of sale
analysis of traditional Chinese medicine products, the purpose of the FT-spectrometer as presented is to demonstrate
what is achievable in terms of performance. Current developments topics address MEMS packaging issues towards long
term stability, further miniaturization and usability.
One of the important challenges for widespread application of MOEMS devices is to provide a modular interface for easy handling and accurate driving of the MOEMS elements, in order to enable seamless integration in larger spectroscopic system solutions. In this contribution we present in much detail the optical design of MOEMS driver modules comprising optical position sensing together with driver electronics, which can actively control different electrostatically driven MOEMS. Furthermore we will present concepts for compact spectroscopic devices, based on different MOEMS scanner modules with lD and 2D optical elements.
A translatory MOEMS actuator with extraordinary large stroke—especially developed for fast optical path length modulation in miniaturized Fourier transform infrared spectrometers (FTSs)—is presented. A precise translational out-of-plane oscillation at 500 Hz with large stroke of up to 1.2 mm is realized by means of an optimized MEMS design using four pantograph suspensions of the comparative large mirror plate with 5-mm diameter. The MOEMS device is driven electrostatically resonant and is manufactured in a CMOS compatible silicon-on-insulator process. Up to ±600 μm amplitude (typically 1 mm stroke) has been measured in vacuum of 30 Pa and 50 V driving voltage for an optimized pantograph design enabling reduced gas damping and higher driving efficiency. For FTS system integration, the MOEMS actuator has been encapsulated in a hybrid optical vacuum package. The thermal influences of packaging technology on MOEMS behavior are discussed in more detail.
Recently, we have realized a new position sensing device for MOEMS mirrors applicable to arbitrary trajectories, which
is based on the measurement of a reflected light beam with a quadrant diode. In this work we present the characteristics of this device, showing first experimental results obtained with a test set-up, but also theoretical considerations and
optical ray-tracing simulations.
In this paper we present a driver for accurate positioning of certain electrostatically driven micro-opto-electromechanical system (MOEMS) based scanner mirrors. The driver unit can control up to six quasi-static mirror axes using closed loop control. The electronics are described in this contribution together with different closed-loop control algorithms, which were implemented for fast and accurate positioning. Results from closed loop operation are compared to the characteristics of the devices when driven in open loop mode. Settlings times and operating bandwidth can be improved by a factor of up 40.
Recently, we have developed compact modules comprising optical position sensing, and driver electronics, with closed
loop control, which can measure the trajectory of resonantly driven 2D-micro-scanner mirrors. In this contribution we
present the optical design of the position sensing unit and highlight various critical aspects. Basically position encoding
is obtained using trigger signals generated when a fast photodiode is hit by a laser beam reflected from the backside of
the mirror. This approach can also be used in the case of 2D-mirrors. In our device the backside of the mirror is hit by
two crossed orthogonal laser beams, whose reflections pass cylindrical mirrors in order to suppress the orthogonal
dimension. Mirror deflection around one axis is compensated at the plane of the detection diodes while deflection around
the other axis leads to a linear displacement of the beam. The optical design of the unit has to provide the optimal
compromise between the requirements for small size and simplicity on the one hand and optical accuracy on the other.
A translatory MOEMS actuator with extraordinary large stroke - especially developed for fast optical path length
modulation in miniaturized FTIR-spectrometers (FTS) - is presented. A precise translational out-of-plane oscillation at 500
Hz with large stroke of up to 1.2 mm is realized by means of an optimized MEMS design using four pantograph
suspensions of the comparative large mirror plate with 5mm diameter. The MOEMS device is driven electro - statically
resonant and is manufactured in a CMOS compatible SOI process. Up to ± 600 μm amplitude (typically 1mm stroke) has
been measured in vacuum of 30 Pa and 50 V driving voltage for an optimized pantograph design enabling reduced gas
damping and higher driving efficiency. For FTS system integration the MOEMS actuator has been encapsulated in a hybrid
optical vacuum package. In this paper we discuss the thermal influences of packaging technology on MOEMS behaviors
more detail.
For MOEMS devices which do not have intrinsic on-chip feedback, position information can be provided with optical
methods, most simply by using a reflection from the backside of a MOEMS scanner. Measurement of timing signals
using fast differential photodiodes can be used for resonant scanner mirrors performing sinusoidal motion with large
amplitude. While this approach provides excellent accuracy it cannot be directly extended to arbitrary trajectories or
static deflection angles. Another approach is based on the measurement of the position of the reflected laser beam with a
quadrant diode. In this work, we present position sensing devices based on either principle and compare both approaches
showing first experimental results from the implemented devices
Standard FT-IR spectrometers are large, usually static, and expensive and require operation by qualified personnel. The
presented development involves achievements in MEMS technologies and electronics design to address size, speed and
power requirements and develop a fully integrated miniaturized FT-IR spectrometer. A suitably matched interaction of
multiple new components - source, interferometer, detector and control and data processing - develops unique MEMS
based spectrometers capable of reliable operation and finally results in compact, robust and economical analyzers. The
presented system now aims at a high performance level to measure in the range between 5000-750 cm-1 at a spectral
resolution better than 10 cm-1. The Michelson interferometer design and the desired performance put several demands on
the MOEMS device. Amongst these, a mirror travel of ± 500 μm and a minimal dynamic deformation of < λ/10 peak-to
peak in combination with a large mirror aperture of 5 mm were the most challenging goals. However, a signal-to-noise
ratio of 1000 is required to qualify a FT-IR system as a sensor for industrial applications e.g. process control. The
purpose of the system, presented in this work, is to proof that this is feasible on the basis of MEMS technology and it is
demonstrated that most of these specifications could be already met.
We have developed compact devices to control electrostatically driven resonant micromirrors with one and two axes. For stable oscillation with large amplitude, operation close to resonance must be ensured under varying environmental conditions. Our devices feature optical position sensing and driver electronics with closed loop control. In this contribution, we present in much detail the novel two-dimensional device and highlight specific aspects of this system.
We show results on the progress in the development of MOEMS based FT spectrometers dedicated to operate in the mid-IR. Recent research is performed within an EC-FP7 project with the goal to show the feasibility of miniaturized high
performance infrared spectroscopic chemical analyzers. Exploiting the high analyte selectivity of the mid-IR paired with
the inherent sensitivity of an FT-IR spectrometer, such devices could be used in a wide range of applications, from air
monitoring over in-line real-time process control to security monitoring. For practical applicability in these fields,
appropriate detection limits and spectral quality standards have to be met. The presented system aims at a performance to
measure in the range between 4000-700 cm-1 at a spectral resolution better than 10 cm-1, which would clearly outmatch
previous MOEMS based spectrometer approaches. A further technological advantage is the rapid-scan capability. The
MOEMS devices oscillate at 500 Hz. A spectrometer based on this device can acquire 1,000 scans per second in
forward-backward mode. The interplay of all these components with the challenges in system integration will be
described in detail and experimental results will be shown, presenting a significant step forward in smart spectroscopic
sensors, microsystems technology and vibrational spectroscopy instrumentation.
We have developed compact devices comprising optical position sensing and driver electronics with closed loop control,
capable of driving resonant 1D- and 2D-MOEMS scanner mirrors. Position encoding is realized by measuring a laser
beam reflected from the backside of the mirror. In the 2D-device we use cylindrical mirrors in order to suppress the
deflection of the orthogonal dimension. This reduces the problem to the control of two independent 1D-oscillations and
allows accurate position sensing. The phase between the oscillations of the two orthogonal axes is actively controlled to
achieve a stable Lissajous figure. In this contribution we also demonstrate that this approach is scalable for
synchronization of separate MEMS mirrors.
Resonantly driven oscillating MOEMS mirrors have many applications in the fields of optics, telecommunication and
spectroscopy. Assuring stable resonant oscillation with well controlled amplitude under varying environmental
conditions is a complex task, which can impede or retard incorporation of such MOEMS mirrors in large systems. For
this we have developed compact modules comprising optical position sensing and driver electronics with closed loop
control, which can ensure stable resonant operation of 1D and 2D micro-mirrors. In this contribution we present in much
detail the position encoding and feedback scheme, and show very first experimental results with the novel 2D device.
A translatory MOEMS actuator with extraordinary large stroke - especially developed for fast optical path length
modulation in miniaturized FTIR-spectrometers - is presented. A precise translational out-of-plane oscillation at 500 Hz
with large stroke of up to 1.2 mm is realized by means of a new suspension design of the comparative large mirror plate
with 19.6 mm² aperture using four pantographs. The MOEMS device is driven electro - statically resonant and is
manufactured in a CMOS compatible SOI process. Up to ± 600 μm amplitude (typically 1mm stroke) has been measured in
vacuum of 30 Pa and 50 V driving voltage for an optimized pantograph design enabling reduced gas damping and higher
driving efficiency.
With MEMS, it became possible to build pocket-sized spectrometers for various spectral ranges, including the near-IR or mid-IR. These systems are highly rugged and can measure spectral changes at ms time resolution or co-add several hundreds of scans to one spectrum achieving adequate signal-to-noise ratios. Two spectrometer systems a scanning grating based spectrometer and a FT-IR spectrometer both based on a micromechanical scanning mirror technology are presented. Furthermore, the focus of this work is on the development of an analyzer for dissolved CO2 showing the methodology and also first implementation steps towards a sensor solution. CO2(aq) calibration samples were prepared by different NaHCO3 concentrations in solution. Spectra and calibration data acquired with both MEMS based spectrometer prototypes are presented.
Resonantly driven oscillating MOEMS mirrors are used in various fields in optics, telecommunications and
spectroscopy. One of the important challenges in this context is to assure stable resonant oscillation with well controlled
amplitude under varying environmental conditions. For this reason, we developed a compact device comprising a
resonant MOEMS micro-mirror, optical position sensing, and driver electronics, with closed loop control, which ensures
operation close to the mirror resonance. In this contribution we present this device and show experimental results with a
23 kHz MOEMS mirror, which demonstrate its capabilities and limitations.
We present a new method for detecting the accurate position of micro-electro-opto-mechanical system (MOEMS)
devices, thus enabling the implementation of closed-loop controls. The ensuing control mechanism allows building
robust MOEMS-based Fourier-transform infrared (FTIR) spectrometers with large mechanical amplitudes and thus good
spectral resolutions. The MOEMS mirror device, a rectangular 1.65 mm² metalized plate mirror suspended on bearing
springs and driven by comb-structured electrodes, is driven by a rectangular signal with a duty cycle of 50% and high
voltage levels up to 140 V at a frequency near twice its mechanical resonance frequency. Out-of-plane mirror
displacements of up to ±100 μm have thus been achieved. To handle the high bandwidth of the sinusoidal mirror position
reference signal, which is generated by a laser reference interferometer, an analog position detection circuit is necessary.
This dedicated circuit demodulates the reference signal and generates a highly accurate control signal returning the zerocrossing
position of the mirror. This permits the implementation of a closed-loop control, which ensures optimally stable
MOEMS mirror movement and maximal mechanical amplitude, even under varying environmental conditions. While
this solution has been developed for a specific MOEMS device, the principle is widely applicable to related components.
In this paper we present a novel translatory MOEMS device with extraordinary large stroke especially designed for fast
optical path modulation in an improved miniaturized Fourier-transform infrared (FTIR) spectrometer capable to perform
time resolved measurements from NIR to MIR. Recently, we presented a first MOEMS based FTIR system using a
different translatory MOEMS actuator with bending suspensions of the mirror plate and ±100μm oscillation amplitude
resulting in a limited spectral resolution of 30 cm-1.
For the novel MOEMS actuator an advanced pantograph suspension of the mirror plate was used to guarantee an
extraordinary large stroke of up to 500 μm required for an improved spectral resolution. To optimize the optical
throughput of the spectrometer the mirror aperture was increased to 7 mm2. The MOEMS actuators are driven electro
statically resonant using out-of-plane comb drives and operate at a resonant frequency of 500 (1000) Hz, respectively.
Hence, this enables to realize an improved MOEMS based FTIR-spectrometer with a spectral resolution of up to 10 cm-1,
a SNR of > 1000:1 and an acquisition time of 1 ms per spectrum of the miniaturized FTIR-system.
In this article we discuss in detail the design and the experimental characteristics of the novel large stroke translatory
MOEMS device. The application and system integration, especially the optical vacuum packaging, of this MOEMS
device in an improved miniaturized MOEMS based FTIR spectrometer enabling ultra rapid measurements in the NIRMIR
spectral region with 12cm-1 spectral resolution is discussed in a separate paper submitted to this conference.
We present an improved FTIR spectrometer using a novel MOEMS actuator and discuss in detail the properties of the
MOEMS component and the resulting FT-IR sensor device. Spectral resolution and the spectral range allow making use
of the inherent multi-analyte detection capabilities giving the spectroscopy platform an advantage over singlewavelength
IR sensors. With its further miniaturization potential due to its MOEMS core, this compact, energy efficient
and robust spectrometer can thus act as transducer for portable and ultra-lightweight spectroscopic IR sensors, e.g. all
purpose hazardous vapor sensors, sensors for spaceborne and Micro-UAV based IR analysis, and many more.
We present several types of translatory MOEMS actuators developed for fast optical-path-length modulation [e.g., in confocal microscopes or Fourier-transform infrared (FTIR) spectrometers] and their application on miniaturized FTIR spectrometers capable of performing time-resolved measurements from the near infrared to the mid infrared. The MOEMS devices are manufactured in a complementary metal oxide semi conductor compatible silicon-on-insulator process. They are electrostatically resonant, driven using in-plane comb drives. A first translatory 5-kHz MOEMS device is used in a first prototype of a miniaturized MOEMS-based FTIR spectrometer where the MOEMS actuator replaces the macroscopic mirror drive, enabling a miniaturized, robust, and low-cost FTIR system. The mirror plate of 1.65 mm2 is suspended by bending springs. Due to the resonant operation, a 200-µm stroke can be achieved with low voltages (<40 V) at an ambient pressure below 500 Pa. Consequently, this yields a spectral resolution of 25 cm−1 and an acquisition time of 200 µs per spectrum. In addition, we present a novel MOEMS device with an increased mirror aperture of 7.1 mm2 and pantograph-like mirror suspension enabling up to a 500-µm stroke. This device is specifically optimized for miniaturized FTIR spectrometers to enable an improved spectral resolution of 10 cm−1 and a signal-to-noise ratio of >1000:1.
Spectroscopy in the infrared region is today an important application to measure, control and investigate liquids or
gases in industrial, medical or environmental applications. We have developed a small, transportable NIRspectrometer
with a size of only 120 x 80 x 80 mm3, and a MOEMS-scanning-grating chip as main element. The
scanning-grating chip is resonantly driven by a pulsed voltage of only 36V, has a mirror aperture of 3 x 3 mm2 and
reaches maximum deflection angles of +/- 11o. The NIR-micro-spectrometer works currently in a spectral range of
1200 - 1900 nm with a resolution of less than 10 nm using only one single InGaAs-diode as detector. Additionally,
scanning grating chips have been already developed for spectral ranges of 900 - 1800 nm and 1250 - 2500 nm. One
entire spectral measurement is done within 6 milliseconds, calculated by a digital signal processor, which is included
in the spectrometer. Results can be either displayed by special computer software or directly by a graphical user
interface. In this paper, we will focus on the control of the grating fabrication process, which can be done by
microscopy, using new control structures. A time-consuming control with SEM (Scanning electron microscope) is
no longer needed. Furthermore the characterization of the fabrication process and its consequence on the
spectrometer properties will be discussed, as well as the characterization of the scanning grating chip itself
(frequency, movement, static deformation, spectral efficiency...). Characteristic measurement results of an argon
calibration lamp, which shows the performance of the NIR-micro-spectrometer, will be presented as well.
In this paper we present a MOEMS based miniaturized Fourier-transform infrared (FTIR) spectrometer capable to
perform time resolved measurements from NIR to MIR. The FTIR-spectrometer is based on a MOEMS translatory
actuator which replaces the macroscopic mirror drive enabling a miniaturized, robust and low cost FTIR system. The
MOEMS device is manufactured in a CMOS compatible process using SOI technology. Due to the electrostatic driving
principle based on in-plane electrode combs, 200 μm stroke can be achieved with comparatively low voltages (<40 V) at
an ambient pressure below 500 Pa. The actuator plate, acting as mirror with an area of 1.65 mm2, operates at a resonant
frequency of 5 kHz. Consequently this yields a maximum spectral resolution of 25 cm-1 and an acquisition time of
200 μs per spectrum. Based on a Michelson setup the infrared optical bench of the presented FTIR system is designed to
account for the mirror aperture and the desired spectral bandwidth of 2 μm to 5 μm. The integrated signal processing
electronics has to cope with a bandwidth of 8 MHz as a result of the mirror motion. A digital signal processor manages
system control and data processing. The high acquisition rate and integration level of the system makes it appropriate for
applications like process control and surveillance of fast reactions. First results of transmission and absorbance
measurements are shown. In addition we present a novel MOEMS device with increased mirror aperture and stroke
which will be used for further optimization of the spectral FTIR-resolution.
We present a Fourier-transform infrared (FTIR) spectrometer where a micro-electro-opto-mechanical system (MOEMS) replaces the macroscopic mirror drive enabling a miniaturized, robust and low cost system. The MOEMS devices are manufactured in a CMOS compatible process on a Silicon on insulator (SOI) substrate. The device consists of a metallized actuator plate with an area of 1.65 mm2 acting as mirror, bearing springs and electrodes for the electrostatic drive. Due to the driving principle based on in-plane electrode combs, 200 μm translatory displacement can be achieved with comparatively low voltages (<40 V) at an ambient pressure below 500 Pa. The actuator operates at a resonant frequency of 5 kHz. Consequently this yields a maximum spectral resolution of 25 cm-1 and an acquisition time of 200 μs per spectrum. Based on a Michelson setup the infrared optical bench of the presented FTIR system is designed to account for the mirror aperture and the desired spectral bandwidth of 2 μm to 5μm. The integrated signal processing electronics has to cope with a bandwidth of 8 MHz as a result of the mirror motion. A digital signal processor manages system control and data processing. Furthermore, high-level analysis algorithms can be applied without the need of an external PC. The high acquisition rate and integration level of the system makes it appropriate for applications like process control and surveillance of fast reactions. First results of transmission and absorbance measurements are shown.
In recent years, Micro Opto Electro Mechanical Systems (MOEMS) have been reached more and more importance in technical applications. This is caused by the increased reliability of micro systems combined with the reduction of costs by high volume production. In this paper, we will present a resonant scanning grating chip with high diffraction efficiency, developed for the NIR region (900 - 2500 nm), which is based on our resonant micro scanning mirror. The grating was additionally applied to the silicon mirror plate by a chemical wet etch process. Therefore, three different fabrication technologies have been developed, showing high efficiencies in the first diffraction order. Compared to investigations with direct structured gratings in the reflective aluminium surface, gratings with up to 714 lines/mm could be fabricated combined with an improved process parameter control. These new resonant driven scanning gratings are still compatible to the scanning mirror fabrication process. They have a large surface of 3x3 mm2 and resonant frequencies of down to 150 Hz, which results in a lower demand on the bandwidth of the electronic read out, when applied to a spectrometer set-up. The maximum mechanically scan angle of the grating mirror plate could be increased to +/- 12° at a driving voltage of 36 V. First measurement results and an improved design of a micro spectrometer, working with only one single InGaAs-Detector in a spectral range of 900 to 2500 nm will be presented and discussed.
Further optimization of the agricultural growth process and quality control of perishable food which can be fruits and vegetables as well as every kind of meat or milk product requires new approaches for the sensitive front end. One possibility is reflectance or fluorescence spectroscopy in a wide wavelength range. By now broad usage is hindered by costs, size and performance of existing systems. MOEMS scanning gratings for spectrometers and translational mirrors for Fourier Transform spectroscopy enable small robust systems working in a range from 200nm to 5μm. Both types use digital signal processors (DSPs) capable to compute the spectra and execute complex evaluation and decision algorithms.
The MOEMS chips are realized by anisotropic etching of a silicon on insulator (SOI) substrate. First the backside silicon and buried oxide is removed by a wet process then the front side structure is realized by dry etching. Depending on the bearing springs a silicon plate up to 3 x 3 mm2 wide and typically 30μm thick can be driven resonantly to rotational or translational movement. Combined with additional optical components and appropriate detectors handheld Czerny-Turner or Fourier Transform spectrometers have been realized and tested.
Results of first measurements of reflection spectroscopy on model substances have been performed with both system types in the NIR range. Measurements on real objects like tomatoes or apples are intended for a wider wavelength range. Future systems may contain displays and light sources as well as data storage cards or additional interfaces.
KEYWORDS: Sensors, Signal processing, Mirrors, Near infrared, Spectroscopy, Digital signal processing, Microopto electromechanical systems, Infrared sensors, Light emitting diodes, LED displays
The examination of spectra in the NIR range is necessary for applications like process control, element analysis or medical systems. Typically integrated NIR spectrometers are based on optical setups with diffraction grating and detector arrays. The main disadvantage is price and availability of NIR array InGaAs-based detectors. The implementation of a scanning grating chip realized in a MOEMS technology which integrates the diffractive element makes it possible to detect spectra with single detectors time resolved. Either simple InGaAs photodiodes or cooled detectors may be used.
The set up is a shrinked Czerny-Turner spectrometer. The light is coupled in by an optical fibre. After focussing the light passes the scanning grating moving at 150-500 Hz in a sinusoidal way. There it is split off in the different wavelength, the monochrome intensity is caught by a second mirror and led to the detector. The detector signal is amplified by a transimpedance stage and converted to digital with 12 bit resolution. The main part of the signal processing is done by a digital signal processor, which is used to unfold the sinusoidal position and calculate the final spectra. The data rate can be up to 3 MHz, then a spectrum is acquired every 2ms by using a 500Hz Mirror. Using the DSP, the spectrometer can operate autarkic without any PC. Then the spectrum is display on a 160 x 80 pixel graphic LCD. A keypad is used to control the functions. For communication a USB port is included, additional interfaces can be realized by a 16-pin expansion port, which is freely programmable, by the system firmware.
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