Dr. Anil Karumuri Profile

Dr. Anil Karumuri

Sr Engineer at Micron Technology Inc

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Publications (2)

Proceedings Article | 6 April 2015 Paper

Magnetron sputtering for the production of EUV mask blanks

Patrick Kearney, Tat Ngai, Anil Karumuri, Jung Yum, Hojune Lee, David Gilmer, Tuan Vo, Frank Goodwin

Proceedings Volume 9422, 94220H (2015) https://doi.org/10.1117/12.2087773

KEYWORDS: Photomasks, Extreme ultraviolet, Reflectivity, Sputter deposition, Multilayers, Semiconducting wafers, Ion beams, Manufacturing, Silicon, EUV optics

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Proceedings Article | 6 April 2015 Paper

SEMATECH produces defect-free EUV mask blanks: defect yield and immediate challenges

Alin Antohe, Dave Balachandran, Long He, Patrick Kearney, Anil Karumuri, Frank Goodwin, Kevin Cummings

Proceedings Volume 9422, 94221B (2015) https://doi.org/10.1117/12.2176126

KEYWORDS: Photomasks, Extreme ultraviolet, Inspection, Extreme ultraviolet lithography, Silica, Deposition processes, Standards development, Manufacturing, Ruthenium, Reflectivity

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