Dr. Ann Witvrouw Profile

Dr. Ann Witvrouw

Manager, MEMS Integration Research Program at imec

SPIE Involvement:

Author

Proceedings Article | 23 September 2010 Paper

SiGe micromirrors for optical applications

R. Beernaert, J. De Coster, T. Podprocky, A. Witvrouw, S. Severi, A. Avci, J. De Smet, H. De Smet

Proceedings Volume 7750, 77501S (2010) https://doi.org/10.1117/12.873061

KEYWORDS: Mirrors, Electrodes, Micromirrors, Microelectromechanical systems, Laser Doppler velocimetry, Modulation, Digital micromirror devices, Analog electronics, Image processing, Chemical mechanical planarization

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Proceedings Article | 3 October 2008 Paper

Long-term reliability measurements on MEMS using a laser-Doppler vibrometer

J. De Coster, L. Haspeslagh, A. Witvrouw, I. De Wolf

Proceedings Volume 7155, 71550G (2008) https://doi.org/10.1117/12.814515

KEYWORDS: Microelectromechanical systems, Laser Doppler velocimetry, Microscopes, Reliability, Cameras, Mirrors, Micromirrors, Optical testing, Data processing, Doppler effect

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Proceedings Article | 3 October 2008 Paper

High throughput measurement techniques for wafer level yield inspection of MEMS devices

O. Varela Pedreira, T. Lauwagie, J. De Coster, L. Haspeslagh, A. Witvrouw, I. De Wolf

Proceedings Volume 7155, 71550M (2008) https://doi.org/10.1117/12.814724

KEYWORDS: Lithium, Inspection, Image segmentation, Semiconducting wafers, Microelectromechanical systems, Mirrors, Measurement devices, Image processing, Micromirrors, Microscopes

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Proceedings Article | 1 July 2005 Open Access

SIGEM, low-temperature deposition of poly-SiGe MEMs structures on standard CMOS circuits

Juan Ramos-Martos, Joaquin Ceballos-Caceres, Antonio Ragel-Morales, Jose Miguel Mora-Gutierrez, Alberto Arias-Drake, Miguel Angel Lagos-Florido, Jose Maria Munoz-Hinojosa, Anshu Mehta, Agnes Verbist, Bert du Bois, Kersten Kehr, Christina Leinenbach, Steven Van Aerde, Jorg Spengler, Ann Witvrouw

Proceedings Volume 5836, (2005) https://doi.org/10.1117/12.608499

KEYWORDS: Amplifiers, Signal to noise ratio, Sensors, Signal detection, Modulators, Microelectromechanical systems, Digital signal processing, Electrodes, Resonators, Semiconducting wafers

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Proceedings Article | 22 January 2005 Paper

Characterization of (near) hermetic zero-level packages for MEMS

Piet De Moor, Kris Baert, Ingrid De Wolf, Anne Jourdain, Harrie Tilmans, Ann Witvrouw, Chris Van Hoof

Proceedings Volume 5716, (2005) https://doi.org/10.1117/12.596190

KEYWORDS: Microelectromechanical systems, Packaging, Sensors, Semiconducting wafers, Reliability, Resonators, Microbolometers, Liquids, Spectroscopy, Thin films

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Proceedings Article | 30 December 2003 Paper

Effect of deposition parameters on the stress gradient of CVD and PECVD poly-SiGe for MEMS applications

Tom Van der Donck, Joris Proost, Cristina Rusu, Kris Baert, Chris Van Hoof, Jean-Pierre Celis, Ann Witvrouw

Proceedings Volume 5342, (2003) https://doi.org/10.1117/12.524406

KEYWORDS: Germanium, Chemical vapor deposition, Plasma enhanced chemical vapor deposition, Transmission electron microscopy, Silicon, Plasma, Scanning electron microscopy, Profilometers, Crystals, Microelectromechanical systems

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Proceedings Article | 28 September 2001 Paper

Planarization of deep trenches

Cristina Rusu, Gerard Klaasse, Sherif Sedky, Heleen Esch, Brigitte Parmentier, Agnes Verbist, Ann Witvrouw

Proceedings Volume 4557, (2001) https://doi.org/10.1117/12.442970

KEYWORDS: Plasma enhanced chemical vapor deposition, Germanium, Silicon, Low pressure chemical vapor deposition, Etching, Polymers, Deposition processes, Plasma, Semiconducting wafers, Coating

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Proceedings Article | 25 August 2000 Paper

Comparison between wet HF etching and vapor HF etching for sacrificial oxide removal

Ann Witvrouw, Bert Du Bois, Piet De Moor, Agnes Verbist, Chris Van Hoof, Hugo Bender, Christiaan Baert

Proceedings Volume 4174, (2000) https://doi.org/10.1117/12.396423

KEYWORDS: HF etching, Etching, Oxides, Vapor etching, Metals, Semiconducting wafers

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Proceedings Article | 30 August 1999 Paper

Fabrication and reliability testing of Ti/TiN heaters

Piet De Moor, Ann Witvrouw, Veerle Simons, Ingrid De Wolf

Proceedings Volume 3874, (1999) https://doi.org/10.1117/12.361232

KEYWORDS: Resistance, Tin, Semiconducting wafers, Reliability, Temperature metrology, Microscopy, Resistors, Microelectromechanical systems, Sensors, Silicon

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Showing 5 of 9 publications

Conference Committee Involvement (4)

Reliability, Packaging, Testing, and Characterization of MEMS/MOEMS V

25 January 2006 | San Jose, California, United States

Reliability, Packaging, Testing, and Characterization of MEMS/MOEMS IV

25 January 2005 | San Jose, California, United States

Reliability, Testing, and Characterization of MEMS/MOEMS III

26 January 2004 | San Jose, California, United States

Reliability, Testing, and Characterization of MEMS/MOEMS II

27 January 2003 | San Jose, CA, United States

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