Ms. Annie Xia Profile

Annie Xia

Sr. Director at Entegris Inc

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Publications (4)

Proceedings Article | 23 March 2020 Presentation + Paper

Addressing metallic contaminants in the photochemical supply chain

Jad Jaber, James Hamzik, Nicholas Filipancic, Justin Brewster, Annie Xia

Proceedings Volume 11326, 1132613 (2020) https://doi.org/10.1117/12.2551646

KEYWORDS: Metals, Surface plasmons, Contamination, Ions, Molecules, Polymers, Photons, Semiconducting wafers, Photoresist materials, Silicon

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Proceedings Article | 25 March 2019 Paper

A new tailored point-of-use filter to reduce immersion lithography downtime and defects

Aiwen Wu, Annie Xia, Hareen Bayana

Proceedings Volume 10960, 109601Y (2019) https://doi.org/10.1117/12.2514976

KEYWORDS: Particles, Metals, Optical lithography, Chemistry, Lithography, Immersion lithography, Manufacturing, Contamination

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Proceedings Article | 25 March 2019 Paper

An exploration of the use of fluoropolymers in photofiltration

A. Wu, A. Xia

Proceedings Volume 10960, 109601U (2019) https://doi.org/10.1117/12.2514958

KEYWORDS: Metals, Lithography, Chemistry, Optical lithography

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Proceedings Article | 20 March 2015 Paper

Point-of-use filtration strategy for negative tone developer in extended immersion and extreme-ultraviolet (EUV) lithography

L. D'Urzo, P. Foubert, H. Stokes, Y. Thouroude, A. Xia, Aiwen Wu

Proceedings Volume 9425, 94251J (2015) https://doi.org/10.1117/12.2185599

KEYWORDS: Extreme ultraviolet, Particles, Lithography, Extreme ultraviolet lithography, Immersion lithography, Metals, Semiconducting wafers, Bridges, Molecular bridges, Scanning electron microscopy

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