The final finish and characterization of windows and domes presents a number of challenges in achieving desired
precision with acceptable cost and schedule. This becomes more difficult with advanced materials and as window and
dome shapes and requirements become more complex, including acute angle corners, transmitted wavefront
specifications, aspheric geometries and trending toward conformal surfaces. Magnetorheological Finishing (MRF®) and
Magnetorheological Jet (MR Jet®), along with metrology provided by Sub-aperture Stitching Interferometry (SSI®) have
several unique attributes that provide them advantages in enhancing fabrication of current and next generation windows
and domes.
The advantages that MRF brings to the precision finishing of a wide range of shapes such as flats, spheres (including
hemispheres), cylinders, aspheres and even freeform optics, has been well documented. Recent advancements include
the ability to finish freeform shapes up to 2-meters in size as well as progress in finishing challenging IR materials. Due
to its shear-based removal mechanism in contrast to the pressure-based process of other techniques, edges are not
typically rolled, in particular on parts with acute angle corners. MR Jet provides additional benefits, particularly in the
finishing of the inside of steep concave domes and other irregular shapes. The ability of MR Jet to correct the figure of
conformal domes deterministically and to high precision has been demonstrated. Combining these technologies with
metrology techniques, such as SSI provides a solution for finishing current and future windows and domes in a reliable,
deterministic and cost-effective way. The ability to use the SSI to characterize a range of shapes such as domes and
aspheres, as well as progress in using MRF and MR Jet for finishing conventional and conformal windows and domes
with increasing size and complexity of design will be presented.
Modern optical designs often include components with shapes more complicated than simple spherical and plano
surfaces. These shapes, which include conformal, steep concave, stepped and free form surfaces, are often difficult to
finish with conventional techniques due to mechanical interference and steep local slopes. A suitable approach to
polishing these shapes is to use a jet of fluid containing an appropriate abrasive. However, a fundamental property of a
fluid jet is that it will begin to lose its coherence once it exits the nozzle. This instability results in an unpredictable
removal rate of the fluid jet, which makes it unsuitable for use in a deterministic finishing process. A method of jet
stabilization whereby a jet of magnetorheological (MR) fluid is magnetized by an axial magnetic field when it flows
from the nozzle has been demonstrated and implemented into the Magnetorheological Jet (MR JetTM) finishing process.
The magnetically stabilized jet of MR polishing fluid produces a stable and reproducible material removal function
(polishing spot) at a distance of several tens of centimeters from the nozzle making MR Jet an attractive technology for
the finishing of complex shapes such as free form optics, steep concaves, and cavities. Recent results will be presented
showing the ability to use this technology to finish a variety of shapes and materials including glass, metals, and
ceramics.
The final finish and characterization of windows and domes presents a number of difficult challenges. Furthermore,
there is a desire to incorporate conformal shapes into next generation imaging and surveillance systems to provide
significant advantages in overall component performance. Unfortunately, their constantly changing curvature and steep
slopes make fabrication of such shapes incompatible with most conventional polishing and metrology solutions. Two
novel types of polishing technology, Magnetorheological Finishing (MRF®) and Magnetorheological Jet (MR JetTM),
along with metrology provided by the Sub-aperture Stitching Interferometer (SSI®) have several unique attributes that
give them advantages in enhancing fabrication of hemispherical domes and even conformal shapes.
The advantages that MRF brings to the precision finishing of a wide range of shapes such as flats, spheres (including
hemispheres), cylinders, aspheres and even freeform optics, has been well documented. The recently developed MR Jet
process provides additional benefits, particularly in the finishing the inside of steep concave domes and other irregular
shapes. Combining these technologies with metrology techniques, such as the SSI, provides a solution for finishing
current and future windows and domes. Recent exciting developments in the finishing of such shapes with these
technologies will be presented. These include new advances such as the ability to use the SSI to characterize a range of
shapes such as domes and aspheres, as well as progress in using MRF and MR Jet for finishing conventional and conformal windows and domes.
The fabrication and metrology of astronomical optics are very demanding tasks. In particular, the large sizes needed for
astronomical optics and mirrors present significant manufacturing challenges. One of the long-lead aspects (and primary
cost drivers) of this process has traditionally been the final polishing and metrology steps. Furthermore, traditional
polishing becomes increasingly difficult if the optics are aspheric and/or lightweight.
QED Technologies (QED(r)) has developed two novel technologies that have had a significant impact on the production
of precision optics. Magnetorheological Finishing (MRF(r)) is a deterministic, production proven, sub-aperture polishing
process that can enable significant reductions in cost and lead-time in the production of large optics. MRF routinely
achieves surface figure accuracy of better than 30 nm peak-to-valley (better than 5 nm rms) and microroughness better
than 1 nm rms on a variety of glasses, glass ceramics and ceramic materials. Unique characteristics of MRF such as a
comparatively high, stable removal rate, the conformal nature of the sub-aperture tool and a shear-mode material
removal mechanism give it advantages in finishing large and lightweight optics. QED has, for instance, developed the
Q22-950F MRF platform which is capable of finishing meter-class optics and the fundamental technology is scalable to
even larger apertures. Using MRF for large optics is ideally partnered by a flexible metrology system that provides full
aperture metrology of the surface to be finished. A method that provides significant advantages for mirror manufacturing
is to characterize the full surface by stitching an array of sub-aperture measurements. Such a technique inherently
enables the testing of larger apertures with higher resolution and typically higher accuracy. Furthermore, stitching lends
itself to a greater range of optical surfaces that can be measured in a single setup. QED's Subaperture Stitching
Interferometer (SSI(r)) complements MRF by extending the effective aperture, accuracy, resolution, and dynamic range of
a standard phase-shifting interferometer. This paper will describe these novel approaches to large optics finishing, and
present a variety of examples.
Subaperture polishing technologies have radically changed the landscape of precision optics manufacturing and enabled the production of components with higher accuracies and increasingly difficult figure requirements. Magnetorheological Finishing (MRF®), for example, is a proven, production-worthy, deterministic, subaperture finishing technology that has excelled at extending precision finishing well beyond the limitations of traditional polishing. Several recent MRF developments will be presented, including the post polishing of Single Point Diamond Turned (SPDT) surfaces, transmitted wavefront correction, and finishing of increasingly large apertures. The high precision finishing of challenging optics using a newly developed jet-based technology will also be discussed. A series of examples spanning a wide range of materials, geometries and specifications will be presented. Specific areas to be discussed include the finishing of optics less than 5 mm in diameter, which typically require a very labor-intensive, iterative process to finish, and the correction of steeply concave optics, such as domes, which are typically not well suited for sub-aperture polishing processes.
Subaperture polishing technologies have radically changed the landscape of precision optics manufacturing and enabled the production of components with higher accuracies and increasingly difficult figure requirements. Magnetorheological Finishing (MRF), for example, is a production-proven, deterministic, subaperture finishing technology that has excelled at overcoming the limitations of traditional polishing. Several recent MRF developments will be presented, including complementing Single Point Diamond Turning (SPDT) technology, transmitted wavefront correction, and finishing of increasingly large apertures. We will also discuss the high precision finishing of challenging optics using a newly developed jet-based technology. A series of examples spanning a wide range of materials, geometries and specifications will be presented. Specific areas to be discussed include micro-optics (i.e., optics less than 5 mm in size), which typically require a very labor-intensive iterative process to finish, and steeply concave optics, such as domes, which are typically not well suited for sub-aperture polishing processes.
Optical fabrication process steps have remained largely unchanged for decades. Raw glass blanks have been rough-machined, generated to near net shape, loose abrasive or fine bound diamond ground and then polished. This set of processes is sequential and each subsequent operation removes the damage and micro cracking induced by the prior
operational step. One of the long-lead aspects of this process has been the glass polishing. Primarily, this has been driven by the need to remove relatively large volumes of glass material compared to the polishing removal rate to ensure complete damage removal. The secondary time driver has been poor convergence to final figure and the corresponding polish-metrology cycles. The overall cycle time and resultant cost due to labor, equipment utilization and shop efficiency is increased, often significantly, when the optical prescription is aspheric. In addition to the long polishing cycle times, the duration of the polishing time is often very difficult to predict given that current polishing processes are not deterministic processes. This paper will describe a novel approach to large optics finishing, relying on several innovative technologies to be presented and illustrated through a variety of examples. The cycle time reductions enabled by this approach promises to result in significant cost and lead-time reductions for large size optics. In addition, corresponding increases in throughput will provide for less capital expenditure per square meter of optic produced. This process, comparative cycles time estimates and preliminary results will be discussed.
Conformal, free form and steep concave optics are important classes of optics that are difficult to finish using conventional techniques due to mechanical interference and steep local slopes. The problem becomes more complicated when the optics approach millimeter size. In this presentation we will discuss some results from finishing such challenging optics to high precision using newly developed jet-based techniques.
In order to enhance missile performance, future window and dome designs will incorporate shapes with improved aerodynamic performance compared with the more traditional flats and spheres. Due to their constantly changing curvature and steep slopes, these shapes are incompatible with most conventional polishing and metrology solutions. Two types of a novel polishing technology, Magnetorheological Finishing (MRF®) and Magnetorheological (MR) Jet, could enable cost-effective manufacturing of free-form optical surfaces.
MRF, a deterministic sub-aperture magnetically assisted polishing method, has been developed to overcome many of the fundamental limitations of traditional finishing. MRF has demonstrated the ability to produce complex optical surfaces with accuracies better than 30 nm peak-to-valley (PV) and surface micro-roughness less than 1 nm rms on a wide variety of optical glasses, single crystals, and glass-ceramics. The polishing tool in MRF perfectly conforms to the optical surface making it well suited for finishing this class of optics. A newly developed magnetically assisted finishing method MR JetTM, addresses the challenge of finishing the inside of steep concave domes and other irregular shapes. An applied magnetic field coupled with the properties of the MR fluid allow for stable removal rate with stand-off distances of tens of centimeters. Surface figure and roughness values similar to traditional MRF have been demonstrated. Combining these technologies with metrology techniques, such as Sub-aperture Stitching Interferometer (SSI®) and Asphere Stitching Interferometer (ASI®), enable higher precision finishing of the windows and domes today, as well as the finishing of future conformal designs.
There is an increasing demand for large sapphire windows for a number of defense related programs. Some of these emerging requirements call for windows that are on the order of half a meter in size with tight surface figure and transmitted wavefront requirements. Magnetorheological Finishing (MRF®) is a deterministic polishing process capable of rapidly converging to the required surface figure. MRF finishing of sapphire has been demonstrated with surface accuracies better than 0.07 μm peak-to-valley (0.010 μm RMS) and surface microroughness less than 1.0 nm RMS on circular and square apertures. As a sub-aperture polishing technique, MRF provides a mechanism for effectively addressing and correcting a variety of optical surface features. This is of particular interest when correcting the transmitted wavefront on windows. The process allows for correction of the optical wavefront when it is aberrated due to inhomogeneity in the material in addition to the errors in the surface. Another benefit is that MRF has been shown to remove subsurface damage left from prior fabrication steps and can improve surface roughness of pre-polished sapphire. We report on a predictable, lower-cost process for fabricating large-scale sapphire windows.
Magnetorheological finishing (MRF) is a production proven, sub-aperture polishing process for flat, spherical, aspherical, and cylindrical optics in the size range of 10 - 400 mm. Surface figure accuracy of better than 30 nm peak-to-valley (better than 5 nm rms), and microroughness better than 1 nm rms is routinely achieved on a variety of glasses, glass ceramics and single crystal materials. Recent work has demonstrated the applicability of MRF for larger apertures and lightweight optics. A platform capable of finishing 1000 mm apertures has already been built. Engineering studies for extending the aperture size further are underway. Finishing of large, lightweight mirrors has additional challenges because the non-uniform support of the face-sheet requires special efforts to avoid quilting errors caused by print-through of the cell structure due to fabrication processes, gravity and/or temperature effects. Unique characteristics of MRF such as a competitively high, stable removal rate, the conformal nature of the sub-aperture tool and a shear mode of material removal give it advantages in finishing this class of optics. Specifically, MRF avoids generating print-through errors and has a high rate of convergence in correcting quilting errors created by other processes, gravity or temperature effects. An additional important quality is that it has been shown that inserting MRF into a manufacturing process can substantially reduce the subsurface damage (SSD), increasing the laser damage threshold of a surface, providing advantages for use in mirror fabrication for high-energy applications. Supporting results will be given in this paper.
Significant challenges are faced in the manufacturing of the complex optics for the next generation of astronomical telescopes. Process improvements are required to establish cost effective techniques to finish the optics to the tight specification required in a timely manner. An added complication is realized when the optics are lightweight. The non-uniform support of the face-sheet in this case requires special efforts to avoid a print-through of the cell structure due to fabrication processes, gravity and/or cryogenic effects. Magnetorheological finishing (MRF) is a deterministic, sub-aperture polishing process that has been a revolutionary success in the fabrication of optics in the size range of 10-1000 mm. This production proven process is capable of polishing flats, spheres, aspheres and cylinders to a surface figure accuracy of better than 30 nm peak-to-valley (better than 5 nm rms), and microroughness better than 1 nm rms on a variety of glasses, glass ceramics and single crystal materials. Unique characteristics of MRF such as a high, stable removal rate, conformal nature of the sub-aperture tool and shear mode of material removal give it advantages in the finishing of large and lightweight optics. These qualities provide for a cost-effective process with a high rate of convergence that requires few iterations. Such a technology is ideally complemented by a system for the stitching of interferometric sub-aperture data. Stitching inherently enables the testing of larger apertures with higher resolution and, thanks to the built-in calibration, even to higher accuracy in many situations. While this approach enables the non-null testing of parts with greater aspheric departure and can lead to a significantly reduced non-common air path in the testing of long-radius concave parts, it is especially effective for convex optics. That is, stitching is particularly well suited to the testing of secondary mirrors and, alongside the testing of the off-axis primary segments.
It has been shown that a magnetically stabilized round jet of MR polishing fluid generates a reproducible material removal function (polishing spot) at a distance of several tens of centimeters from the nozzle. As a polishing technique, this unique tool resolves a challenging problem of high precision finishing of steep concave surfaces and cavities. Theoretical prerequisites and experimental results are discussed.
Spot surface morphology can be considered as a footprint of the removal process in magnetorheological finishing (MRF). When properly processed, it can account for the performance of the MR fluid in polishing. Experiments were done using different conditions to vary removal rate and evaluate the resulting effect on microroughness and the overall spot surface morphology. Such experiments have been performed on two optical glasses, with several different MR fluids and a wide range of machine parameter settings. Atomic force microscope (AFM) measurements show that the surface morphology has a strong dependence on the abrasive type in the MR fluid. Interferometry measurements show that the roughness inside the spot increases with the rate of the material removal.
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