Ms. Arjun Rajagopal Profile

Arjun Rajagopal

at Texas Instruments Inc

SPIE Involvement:

Author

Publications (2)

Proceedings Article | 13 March 2009 Paper

Variations in timing and leakage power of 45nm library cells due to lithography and stress effects

Kayvan Sadra, Mark Terry, Arjun Rajagopal, Robert Soper, Donald Kolarik, Tom Aton, Brian Hornung, Rajesh Khamankar, Philippe Hurat, Bala Kasthuri, Yajun Ran, Nishath Verghese

Proceedings Volume 7275, 72750K (2009) https://doi.org/10.1117/12.816485

KEYWORDS: Transistors, Lithography, Computer simulations, Statistical analysis, Logic, Data modeling, Capacitors, Optical proximity correction, Convolution, Design for manufacturing

Read Abstract +

Proceedings Article | 19 March 2008 Paper

Context analysis and validation of lithography induced systematic variations in 65nm designs

Arjun Rajagopal, Anand Rajaram, Raguram Damodaran, Frank Cano, Srinivas Swaminathan, Clive Bittlestone, Mark Terry, Mark Mason, Yajun Ran, Haizhou Chen, Robert Ritchie, Bala Kasthuri, Jac Condella, Philippe Hurat, Nishath Verghese

Proceedings Volume 6925, 69250A (2008) https://doi.org/10.1117/12.778836

KEYWORDS: Silicon, Model-based design, Data modeling, Etching, Scanning electron microscopy, Transistors, Optical proximity correction, Lithography, Critical dimension metrology, Process modeling

Read Abstract +

View contact details

UPDATE YOUR PROFILE

Is this your profile? Update it now.

Sign into your SPIE.org account

Don’t have a profile and want one?

Create an account on SPIE.org

Keywords/Phrases

Search In:

Publication Years