Method for the analysis of plasmonic gratings is developed. The mathematical research of the spectral-angular characteristics of plasmonic gratings is realized. The dependency of spectral-angular characteristics on geometric parameters of the plasmonic grating are disclosed. Samples of plasmonic gratings are obtained. The results of mathematical modeling and theoretical studies are confirmed by the experimental samples. Spectral-angular characteristics of the plasmonic gratings samples qualitatively repeat theoretically modeled characteristics.
KEYWORDS: Oxides, Silicon, Transmission electron microscopy, Crystals, Calibration, Chemical elements, Distance measurement, Temperature metrology, Electron microscopes, Phosphorus
The study was performed on a test step relief structure of monocrystalline silicon. There was experimentally measured the thickness of the natural oxide on this structure consisting of a set of elements (protrusions) with a trapezoidal profile and 2.0 μm step size, upper base about 10 nm, height about 500 nm. The tilt angle of side face with respect to the lower base was 54.7°. The entire structure was covered with a natural oxide film that appeared at room temperature, the thickness of which is being measured using a transmission electron microscope with atomic resolution by the observed pattern in the direct mode resolution of the crystal structure. In order to calibrate the measurements a distance between {111} planes was used. It was shown experimentally, that in the area of this bottom the natural oxide thickness increases from 2.3 ± 0.2 nm in the middle of the bottom to 3.0 ± 0.2 nm and 4.5 ± 0.2 nm at the left and right edges of the bottom, respectively.
We review current status and perspectives of nanolithography via atom optics and its application in production of
nanophotonics and nanoplasmonics elements: gold optical nano antennas, plasmonic wave guides, nanostructures formed
by organic molecules.
Access to the requested content is limited to institutions that have purchased or subscribe to SPIE eBooks.
You are receiving this notice because your organization may not have SPIE eBooks access.*
*Shibboleth/Open Athens users─please
sign in
to access your institution's subscriptions.
To obtain this item, you may purchase the complete book in print or electronic format on
SPIE.org.
INSTITUTIONAL Select your institution to access the SPIE Digital Library.
PERSONAL Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.