We demonstrated nonvolatile, electrically programmable, phase-only modulation of free-space infrared radiation in transmission based on low-loss phase change materials (PCMs) Sb2Se3. By coupling ultra-thin PCM to a high quality-factor (Q~406) diatomic metasurface, we demonstrated a phase-only modulation of ~0.25π (~0.2π) in simulation (experiment), ten times larger than without using the metasurface. The metasurface is robust against reversible switching over 1,000 times. Finally, we showed independent control of 17 meta-molecules, achieving ten deterministic resonance levels in a tunable notch filter with a maximum spectral shift of ~8nm. The independent control also allowed us to achieve varifocal lensing. This work paves way to a nonvolatile phase-only SLM.
We demonstrate a nonvolatile electrically programmable phase-change silicon photonic switch and phase shifter leveraging a monolayer graphene heater with record-high programming energy efficiency (8.7±1.4 aJ/nm3) and endurance (> 1,000 cycles).
Scaling the cell size of phase change memory (PCM) is crucial for reducing reset current and enabling energy-efficient switching. Because memory arrays have a regular pattern, block copolymer directed self-assembly (DSA) is uniquely suited for reducing patterning costs for future nanoscale PCM. Here, we realize the fabrication and electrical characterization of a PCM array with Ge2Sb2Te5 phase change material featuring 20-nm cells patterned by DSA. Our confined cell PCM devices with ~20 nm bottom contact diameter switch at ~150-200 μA, while maintaining a resistance on/off ratio of ~10. We also discuss some factors for further consideration for improving the limited endurance of such nanoscale confined cell PCM. Our demonstration would inspire further reduction of the PCM cell size below 10 nm using high-χ block copolymers, thus paving the pathway towards ultrahigh density memory.
Access to the requested content is limited to institutions that have purchased or subscribe to SPIE eBooks.
You are receiving this notice because your organization may not have SPIE eBooks access.*
*Shibboleth/Open Athens users─please
sign in
to access your institution's subscriptions.
To obtain this item, you may purchase the complete book in print or electronic format on
SPIE.org.
INSTITUTIONAL Select your institution to access the SPIE Digital Library.
PERSONAL Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.