Dr. Audrey C. Engelsberg Profile

Dr. Audrey C. Engelsberg

Engineer at Radiance Services Co

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Author

Publications (4)

Proceedings Article | 3 June 1998 Paper

Transition from laboratory to manufacturing for a dry laser-assisted cleaning technology

Audrey Engelsberg

Proceedings Volume 3274, (1998) https://doi.org/10.1117/12.309499

KEYWORDS: Manufacturing, Laser applications, Pulsed laser operation, Process control, Polarization, Light sources, Nd:YAG lasers, Laser processing, Excimers

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Proceedings Article | 27 December 1996 Paper

Contamination removal from photomasks using a dry laser-assisted cleaning technology

Audrey Engelsberg

Proceedings Volume 2884, (1996) https://doi.org/10.1117/12.262798

KEYWORDS: Photomasks, Manufacturing, Photons, Laser applications, Contamination, X-rays, Particles, Polarization, Optics manufacturing, X-ray optics

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Proceedings Article | 19 October 1994 Paper

Removal of surface contaminants using a chemical-free laser-assisted process

Audrey Engelsberg

Proceedings Volume 2261, (1994) https://doi.org/10.1117/12.190151

KEYWORDS: Photons, Optics manufacturing, Laser processing, Thin films, Excimer lasers, Liquids, Manufacturing, Semiconductors, Natural surfaces, Semiconducting wafers

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Proceedings Article | 1 June 1992 Paper

Overlay process control for 16-Mb DRAM manufacturing

Audrey Engelsberg, Debra Leach

Proceedings Volume 1673, (1992) https://doi.org/10.1117/12.59826

KEYWORDS: Metrology, Optical lithography, Overlay metrology, Process control, Inspection, Integrated circuits, Manufacturing, Optical alignment, Data modeling, Tolerancing

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