A novel tunable resonant cavity enhanced photodetector (RCE-PD) is achieved by
using an air gap. The optical properties of the photodetector are designed by using the transfer matrix
method (TMM). The quantum efficiency (QE) of the tunable RCE-PD is calculated and the
optimizing structure is obtained. It is revealed that the peak QE increases to the highest value
( 92%) when the thickness of active layer is 106nm. When the air layer thickness changed 20nm
under a low bias voltage, the peak wavelength blue shifts from 1550nm to 1547.9nm and the QE
of the device keeps almost invariant at the same time.
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