Dr. Barbara Witek Profile

Dr. Barbara Witek

at ASML Netherlands B.V.

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Publications (1)

Proceedings Article | 1 November 2022 Paper

Spatial frequency breakdown of CD variation

Tatiana Kovalevich, Barbara Witek, Daniel Riggs, Joost Bekaert, Lieve Van Look, Mark John Maslow

Proceedings Volume 12472, 124720H (2022) https://doi.org/10.1117/12.2640808

KEYWORDS: Critical dimension metrology, Metrology, Semiconducting wafers, Photomasks, Spatial frequencies, Stochastic processes, Scanning electron microscopy, Scanners, Fourier transforms, Finite element methods

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