Ms. Beatriz Seoane de la Cuesta Profile

Beatriz Seoane de la Cuesta

at ASML Netherlands BV

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Publications (1)

Proceedings Article | 28 April 2023 Presentation + Paper

EUV pellicle scanner integration for N2 nodes and beyond

Mark van de Kerkhof, Alexander Klein, Beatriz Seoane, Paul Vermeulen, Emily Gallagher, Marina Timmermans, Ivan Pollentier, Joost Bekaert

Proceedings Volume 12494, 124940D (2023) https://doi.org/10.1117/12.2658353

KEYWORDS: Pellicles, Extreme ultraviolet, Scanners, Extreme ultraviolet lithography, Deep ultraviolet, Reticles, Semiconducting wafers, Composites, Particles, Metals

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