Mr. Benjamin A. Park Profile

Benjamin A. Park

at Univ of Western Australia

SPIE Involvement:

Author

Publications (1)

Proceedings Article | 18 May 2006 Paper

B. Park, C. Musca, J. Antoszewski, T. Nguyen, K. Winchester, J. Dell, L. Faraone

Proceedings Volume 6206, 62062G (2006) https://doi.org/10.1117/12.664872

KEYWORDS: Plasma, Reactive ion etching, Mercury cadmium telluride, Etching, Argon, Ions, Temperature metrology, Photodiodes, Mercury, Plasma etching

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Keywords/Phrases