KEYWORDS: Distortion, Fiber Bragg gratings, 3D metrology, Image processing, Signal processing, Edge detection, Detection and tracking algorithms, 3D image processing, Reflection, Data acquisition
In order to achieve the measurement of three-dimensional (3D) surface topography of microdevices, this study uses high-sensitivity fiber Bragg grating (FBG) as the sensitive element of the contact measurement probe system and studies the device surface microtopography scanning measurement system based on FBG probe, which is used for the measurement and characterization of micrometer-sized microdevices, with high measurement resolution and low cost. In this study, a low-priced micro-displacement output strategy combining macro- and micro-motion was adopted, and an improved image horizontal distortion correction algorithm was proposed to correct the horizontal distortion of the image. Through the performance experiments of the measurement system, a micro-displacement measurement sensitivity of 12.21 mV/nm and a measurement resolution of 0.46 nm are obtained. The measurement results of bar structure step standard specimens show that the system can distinguish the step height of 200 nm by contact scanning measurement, solve the problem of horizontal distortion in the global distribution of the image, and realize the 3D measurement and characterization of micron-scale surface topography.
Access to the requested content is limited to institutions that have purchased or subscribe to SPIE eBooks.
You are receiving this notice because your organization may not have SPIE eBooks access.*
*Shibboleth/Open Athens users─please
sign in
to access your institution's subscriptions.
To obtain this item, you may purchase the complete book in print or electronic format on
SPIE.org.
INSTITUTIONAL Select your institution to access the SPIE Digital Library.
PERSONAL Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.