In this work, a new type of optical fiber pressure sensor based on Frequency Modulated Continuous Wave (FMCW) laser interference technology was designed and produced. The sensor consists of a diaphragm-type Fabry-Perot (F-P) cavity structure, which is made of 316L stainless steel with excellent elastic properties. The deformation of the diaphragm occurs under the gas pressure, which causes the length of the F-P cavity to change. The FMCW laser interference technique was employed to demodulate the change of cavity length. The experimental results show that the linearity of pressure and cavity length can reach 0.99993 whin the range of 0~600 kPa, and also verify that the pressure sensor has good repeatability and stability.
The Laser Displacement Sensor is designed according to the principle of laser triangulation. It is a precise geometric measurement sensor, and it is characterized by non-contact and high measuring efficiency. However, the measurement accuracy of the LDS is easily influenced by other factors, especially for free-form surfaces where the incidence angle has greater impact on measurement accuracy and the research is relatively less. The paper proposes a new error compensation strategy and the method of calculating incidence angle. It can effectively improve the measurement accuracy of free-form surfaces by inclination error compensation. The experiment verifies the correctness and reliability of the error model by using a Laser Interferometer. The result shows that the measurement accuracy is less than 10μm.
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