Mr. Bo Feng Profile

Bo Feng

at Harbin Institute of Technology

SPIE Involvement:

Author

Publications (1)

This will count as one of your downloads.

You will have access to both the presentation and article (if available).

DOWNLOAD NOW

This content is available for download via your institution's subscription. To access this item, please sign in to your personal account.

Email or Username Forgot your username?

Password Forgot your password?

Show

Keep me signed in

No SPIE account? Create an account

Proceedings Article | 18 September 2014 Paper

Study on method of radiometric calibration for precision measurement of micro size damage site

Hao-yu Yuan, Zhi-tao Peng, Wen-fang Wang, Feng-dong Chen, Jun Tang, Bo Feng, Guo-dong Liu, Bing-guo Liu

Proceedings Volume 9282, 92821A (2014) https://doi.org/10.1117/12.2074034

KEYWORDS: Optical damage, Calibration, Charge-coupled devices, Optical inspection, Inspection, Optical testing, Precision measurement, Radio optics, Laser induced damage, Silica

Read Abstract +

Large aperture optical have high risk of damage when woke on high flux laser. For avoid lethal damages breakdown the expensive large aperture optical, replace the optical that damaged before damage site increase to can’t repaired, we need precision measurement of optical surface damage sites size. The size of the optics which be detected is 400μm ×400μm, and the size of CCD array pixel is 4K×4K which we selected, so pixel resolution only 100μm of the Optical Damage Online Inspection system, it hard to measurement damage sites which size less than 100μm. This paper describes a method of radiometric calibration to measure online optical damage site that greater than 50μm by Optical Damage Online Inspection system. Numerical statement gray on CCD of different size damage sites by select a fixed variable of illumination intensity, shutter and numerical aperture of image-forming system. Fitting a curve with suitable function of gray and actual size, precision measure optical damage sites that greater than 50μm by the curve. Test results indicate that, the deviation less than 20% which measure size and actual size .This method settle problems of micro size damage site hard to measure online under the condition of long working distance and low optical resolution. At present, this method have used on Optical Damage Online Inspection system of high flux laser installation, it important significance for observation damage site size grown and accurately appraise the optical damage.

My Library

You currently do not have any folders to save your paper to! Create a new folder below.

Folder Name

Folder Description

View contact details

UPDATE YOUR PROFILE

Is this your profile? Update it now.

Sign into your SPIE.org account

Don’t have a profile and want one?

Create an account on SPIE.org

Access to the requested content is limited to institutions that have purchased or subscribe to SPIE eBooks. You are receiving this notice because your organization may not have SPIE eBooks access.*

*Shibboleth/Open Athens users─please sign in to access your institution's subscriptions.

To obtain this item, you may purchase the complete book in print or electronic format on SPIE.org.

ORGANIZATIONAL
Sign in with credentials provided by your organization.

Organizational Username

Organizational Password

Show/Hide Password

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

;

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available

Members:

Non-members: ADD TO CART

Keywords/Phrases

Search In:

Publication Years