Prof. Boris N. Chichkov Profile

Prof. Boris N. Chichkov

Head of the Nanotechnology Dept at Laser Zentrum Hannover eV

SPIE Involvement:

Author

Publications (78)

Proceedings Article | 4 March 2022 Presentation + Paper

Presentation + Paper

Laser surface processing of titanium alloy for antibacterial medical applications

Andrei Buzykin, Yulia Karlagina, Maxim Radaev, Elena Egorova, Ekaterina Zernitskaya, Boris Chichkov, Nils Heine, Meike Stiesch, Katharina Doll, Galina Odintsova, Vadim Veiko

Proceedings Volume 11989, 1198908 (2022) https://doi.org/10.1117/12.2609543

KEYWORDS: Titanium, Semiconductors, Oxides, Titanium dioxide, Laser processing, Ions, Bacteria, Medical devices, Laser therapeutics, Laser applications

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Proceedings Article | 26 July 2016 Open Access

Open Access

Presentation

Laser printing of nanoparticles for applications in nanophotonics (Conference Presentation)

Boris Chichkov

Proceedings Volume 9884, 98841B (2016) https://doi.org/10.1117/12.2227508

KEYWORDS: Nanoparticles, Nonimpact printing, Nanophotonics, Nanolithography, Plasmonics, Laser development, Laser applications, Dielectrics, Optical sensing, Nanostructures, Current controlled current source

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Proceedings Article | 13 November 2014 Paper

Paper

Ex-situ preparation of high-conductive polymer/SWNTs nanocomposites for structure fabrication

Qingchuan Guo, Reza Ghadiri, Thomas Weigel, Andreas Aumann, Evgeny Gurevich, Cemal Esen, Yan Li, Wei Cheng, Boris Chichkov, Andreas Ostendorf

Proceedings Volume 9277, 927714 (2014) https://doi.org/10.1117/12.2071870

KEYWORDS: Single walled carbon nanotubes, Polymers, Two photon polymerization, Composites, Nanocomposites, Raman spectroscopy, Polymerization, Nanolithography, Femtosecond phenomena, Laser processing

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Proceedings Article | 1 May 2012 Paper

Paper

Multipole contributions into resonant scattering of light by nonspherical nanoparticles using the discrete dipole approximation

Andrey Evlyukhin, Carsten Reinhardt, Boris Chichkov

Proceedings Volume 8424, 84240M (2012) https://doi.org/10.1117/12.922295

KEYWORDS: Nanoparticles, Magnetism, Scattering, Light scattering, Silicon, Particles, Raman scattering, Mie scattering, Metamaterials, Laser scattering

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Proceedings Article | 25 April 2012 Paper

Paper

Inverted Yablonovite-like 3D photonic crystals fabricated by laser nanolithography

Ivan Shishkin, Kirill Samusev, Mikhail Rybin, Mikhail Limonov, Yuri Kivshar, Arune Gaidukeviciute, Roman Kiyan, Boris Chichkov

Proceedings Volume 8425, 84252C (2012) https://doi.org/10.1117/12.940752

KEYWORDS: Photonic crystals, Nanolithography, Dielectrics, Two photon polymerization, Optical spheres, Laser crystals, Zirconium, Scanning electron microscopy, Magnetism, Electron microscopes

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Proceedings Article | 30 March 2012 Paper

Paper

Optical sensing elements based on ordered semiconductor and metal nanoparticle arrays and surface plasmons

Carsten Reinhardt, A. Evlyukhin, W. Cheng, A. Gaidukeviciute, A. Kuznetsov, U. Zywietz, B. Chichkov

Proceedings Volume 8346, 83460O (2012) https://doi.org/10.1117/12.915498

KEYWORDS: Nanoparticles, Particles, Gold, Metals, Scattering, Spherical lenses, Refractive index, Femtosecond phenomena, Laser scattering, Two photon polymerization

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Proceedings Article | 20 February 2012 Paper

Paper

Heat-induced structure formation in metal films generated by single ultrashort laser pulses

Jürgen Koch, Claudia Unger, Boris Chichkov

Proceedings Volume 8244, 824408 (2012) https://doi.org/10.1117/12.908561

KEYWORDS: Laser ablation, Gold, Pulsed laser operation, Metals, Ultrafast phenomena, Image processing, Scanning electron microscopy, Laser damage threshold, Phonons, Glasses

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Proceedings Article | 23 May 2011 Paper

Paper

Depth sensitive Fourier-Scatterometry for the characterization of sub-100 nm periodic structures

V. Ferreras Paz, S. Peterhänsel, Ka. Frenner, W. Osten, A. Ovsianikov, K. Obata, B. Chichkov

Proceedings Volume 8083, 80830M (2011) https://doi.org/10.1117/12.889439

KEYWORDS: Critical dimension metrology, Silicon, Mirrors, Diffraction, Metrology, Two photon polymerization, Photoresist materials, Microscopes, Scatterometry, Photosensitive materials

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Proceedings Article | 8 February 2011 Paper

Paper

Laser treatment of the heterolayers GeO2:Ge-QDs

E. Gorokhov, V. Volodin, A. Kuznetsov, B. Chichkov, K. Astankova, I. Azarov

Proceedings Volume 7994, 79940W (2011) https://doi.org/10.1117/12.882043

KEYWORDS: Germanium, Laser ablation, Pulsed laser operation, Crystals, Silica, Femtosecond phenomena, Raman spectroscopy, Absorption, Solids, Multilayers

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Proceedings Article | 11 May 2010 Paper

Paper

Characterization of laser-written dielectric-loaded surface plasmon polariton waveguides by leakage radiation microscopy

C. Reinhardt, A. Seidel, W. Cheng, A. Evlyukhin, B. Chichkov

Proceedings Volume 7712, 77122Z (2010) https://doi.org/10.1117/12.854665

KEYWORDS: Waveguides, Two photon polymerization, Microscopy, Nanoimprint lithography, Surface plasmon polaritons, Optical filters, Metals, Polymers, Photoresist materials, Mach-Zehnder interferometers

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Proceedings Article | 11 May 2010 Paper

Paper

Theoretical modelling and leakage radiation microscopy of surface plasmon polariton excitation and scattering on laser fabricated surface structures

C. Reinhardt, A. Kuznetsov, A. Evlyukhin, W. Cheng, A. Seidel, B. Chichkov

Proceedings Volume 7712, 771209 (2010) https://doi.org/10.1117/12.854636

KEYWORDS: Scattering, Laser scattering, Nanoparticles, Gold, Particles, Light scattering, Spherical lenses, Metals, Microscopy, Two photon polymerization

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Proceedings Article | 3 March 2010 Paper

Paper

Femtosecond laser microstructuring and bioactive nanocoating of titanium surfaces in relation to chondrocyte growth

Justus Ilgner, Slavomir Biedron, Elena Fadeeva, Boris Chichkov, Doris Klee, Anneke Loos, Eveline Sowa-Söhle, Martin Westhofen

Proceedings Volume 7548, 75482Y (2010) https://doi.org/10.1117/12.847361

KEYWORDS: Titanium, Nano coatings, Femtosecond phenomena, Ear, Tissues, Proteins, Molecules, Natural surfaces, Coating, Interfaces

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Proceedings Article | 18 February 2010 Paper

Paper

Individually controlled multi-focus laser processing for two-photon polymerization

Kotaro Obata, Jürgen Koch, Boris Chichkov

Proceedings Volume 7584, 75840L (2010) https://doi.org/10.1117/12.842117

KEYWORDS: Two photon polymerization, Computer generated holography, Spatial light modulators, Laser processing, Phase modulation, Polymers, Diffractive optical elements, Switching, Scanning electron microscopy, Parallel processing

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Proceedings Article | 16 February 2010 Paper

Paper

3D biomedical implants fabricated using direct laser writing

C. Schizas, V. Melissinaki, A. Gaidukeviciute, C. Reinhardt, C. Ohrt, V. Dedoussis, B. Chichkov, C. Fotakis, D. Karalekas, M. Farsari

Proceedings Volume 7591, 759105 (2010) https://doi.org/10.1117/12.840695

KEYWORDS: Two photon polymerization, Blood circulation, Scanning electron microscopy, Blood, Veins, Sol-gels, Biomedical optics, Fabrication, Distortion, Multiphoton lithography

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Proceedings Article | 2 September 2009 Paper

Paper

Direct laser writing of photonic nanostructures

I. Sakellari, A. Gaidukeviciute, A. Giakoumaki, D. Gray, C. Fotakis, M. Vamvakaki, M. Farsari, C. Reinhardt, A. Ovsianikov, B. Chichkov

Proceedings Volume 7392, 73920Y (2009) https://doi.org/10.1117/12.825560

KEYWORDS: Composites, Refractive index, Titanium, Thin films, Two photon polymerization, Photonic crystals, Mirrors, Multiphoton lithography, Photonic nanostructures, Sol-gels

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Proceedings Article | 17 July 2009 Paper

Paper

Femtosecond laser microstructuring of titanium surfaces for middle ear ossicular replacement prosthesis: results of preliminary studies

S. Biedron, J. F. R. Ilgner, E. Fadeeva, B. Chichkov, A. Prescher, M. Bovi, M. Westhofen

Proceedings Volume 7373, 73731A (2009) https://doi.org/10.1117/12.831883

KEYWORDS: Titanium, Ear, Natural surfaces, Tissues, Femtosecond phenomena, Cartilage, Collagen, Laser therapeutics, Surgery, In vitro testing

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Proceedings Article | 23 February 2009 Paper

Paper

Femtosecond laser microstructuring of titanium surfaces for middle ear ossicular replacement prosthesis

Justus Ilgner, Slavomir Biedron, Elena Fadeeva, Boris Chichkov, Martin Westhofen

Proceedings Volume 7161, 71611X (2009) https://doi.org/10.1117/12.806691

KEYWORDS: Titanium, Tissues, Ear, Femtosecond phenomena, Natural surfaces, Manufacturing, Coating, Cartilage, Interfaces, Chemical vapor deposition

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Proceedings Article | 8 May 2008 Paper

Paper

Excitation and focusing of surface plasmon polaritons by nanostructuring

Andrey Stepanov, Andrey Evlyukhin, Roman Kiyan, Sven Passinger, Andreas Seidel, Boris Chichkov

Proceedings Volume 6988, 698804 (2008) https://doi.org/10.1117/12.780449

KEYWORDS: Gold, Particles, Nanoparticles, Silver, Metals, Glasses, Interfaces, Surface plasmon polaritons, Two photon polymerization, Nanostructuring

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Proceedings Article | 3 April 2008 Paper

Paper

Performance and lifetime of EUV source collectors measured with a full size EUV collector reflectometer

Ulf Hinze, Boris Chichkov, Torsten Feigl, Uwe Zeitner, Christoph Damm, Denis Bolshukhin, Jürgen Kleinschmidt, Guido Schriever, Max-Christian Schürmann

Proceedings Volume 6921, 69213A (2008) https://doi.org/10.1117/12.772486

KEYWORDS: Extreme ultraviolet, Mirrors, Reflectometry, Metrology, Objectives, EUV optics, Optical filters, CCD cameras, Extreme ultraviolet lithography, Reflectivity

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Proceedings Article | 28 September 2007 Paper

Paper

Focusing and manipulation of surface plasmon polaritons by laser fabricated dielectric structures

Carsten Reinhardt, Roman Kiyan, Andreas Seidel, Sven Passinger, Andrey Stepanov, Andrey Evlyukhin, Boris Chichkov

Proceedings Volume 6642, 664205 (2007) https://doi.org/10.1117/12.733624

KEYWORDS: Dielectrics, Plasmons, Waveguides, Two photon polymerization, Gold, Metals, Polymers, Refractive index, Nanolithography, Glasses

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Proceedings Article | 18 May 2007 Paper

Paper

At-wavelength diagnostics of EUV-optics

U. Hinze, M. Fokoua, B. Chichkov

Proceedings Volume 6586, 65860Q (2007) https://doi.org/10.1117/12.722786

KEYWORDS: Reflectivity, Extreme ultraviolet, Reflectometry, Metrology, Grazing incidence, Mirrors, Diagnostics, Synchrotrons, Particles, Sensors

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Proceedings Article | 16 May 2007 Paper

Paper

3D nanomanufacturing with femtosecond lasers and applications

Sven Passinger, Roman Kiyan, Alexandr Ovsianikov, Carsten Reinhardt, Boris Chichkov

Proceedings Volume 6591, 659104 (2007) https://doi.org/10.1117/12.721714

KEYWORDS: Two photon polymerization, Photonic crystals, Plasmons, Metals, Scanning electron microscopy, Dielectrics, Lawrencium, Femtosecond phenomena, Dielectric polarization, Photosensitive materials

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Proceedings Article | 4 May 2007 Paper

Paper

Two-photon polymerization and the applications in plasmonics

Sven Passinger, Andrey Stepanov, Andrey Evlyukhin, Carsten Reinhardt, Roman Kiyan, Boris Chichkov

Proceedings Volume 6581, 65810U (2007) https://doi.org/10.1117/12.722855

KEYWORDS: Two photon polymerization, Particles, Nanoparticles, Dielectrics, Gold, Interfaces, Glasses, Nanolithography, Femtosecond phenomena, Plasmonics

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Proceedings Article | 21 March 2007 Paper

Paper

High-accuracy EUV reflectometer

U. Hinze, M. Fokoua, B. Chichkov

Proceedings Volume 6517, 651732 (2007) https://doi.org/10.1117/12.712853

KEYWORDS: Extreme ultraviolet, Reflectometry, Grazing incidence, Mirrors, Reflectivity, Sensors, Optical filters, Metrology, Diodes, Photomasks

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Proceedings Article | 7 March 2007 Paper

Paper

Dielectric and metallic plasmonic components fabricated with femtosecond lasers

Carsten Reinhardt, Roman Kiyan, Sven Passinger, Boris Chichkov

Proceedings Volume 6462, 646215 (2007) https://doi.org/10.1117/12.700634

KEYWORDS: Dielectrics, Gold, Plasmons, Femtosecond phenomena, Two photon polymerization, Metals, Glasses, Lithography, Waveguides, Microscopes

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Proceedings Article | 7 March 2007 Paper

Paper

Production of 3D photonic components with ultrafast micromachining

M. Boyle, A. Neumeister, R. Kiyan, C. Reinhardt, U. Stute, B. Chichkov, Wendel Wohlleben, R. Leyrer

Proceedings Volume 6462, 646212 (2007) https://doi.org/10.1117/12.698564

KEYWORDS: Optical spheres, Crystals, Two photon polymerization, Photonic crystals, Polymers, Femtosecond phenomena, Micromachining, Laser ablation, Radio propagation, Absorption

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Proceedings Article | 22 January 2007 Paper

Paper

Two-photon polymerization for fabrication of biomedical devices

Aleksandr Ovsianikov, Anand Doraiswamy, R. Narayan, B. Chichkov

Proceedings Volume 6465, 64650O (2007) https://doi.org/10.1117/12.699979

KEYWORDS: Two photon polymerization, Polymers, Skin, Tissues, Glasses, Biomedical optics, Fabrication, 3D microstructuring, Nanolithography, Absorption

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Proceedings Article | 22 January 2007 Paper

Paper

Fabrication of micromechanical and microoptical systems by two-photon polymerization

Carsten Reinhardt, A. Ovsianikov, Sven Passinger, Boris Chichkov

Proceedings Volume 6466, 64660M (2007) https://doi.org/10.1117/12.700668

KEYWORDS: Two photon polymerization, Photonic crystals, Microfluidics, Glasses, Objectives, Femtosecond phenomena, Absorption, Photosensitive materials, Refractive index, Solids

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Proceedings Article | 11 September 2006 Paper

Paper

Multiphoton laser lithography for the fabrication of plasmonic components

Sven Passinger, Jürgen Koch, Roman Kiyan, Carsten Reinhardt, Boris Chichkov

Proceedings Volume 6324, 63240U (2006) https://doi.org/10.1117/12.680418

KEYWORDS: Femtosecond phenomena, Plasmonics, Nanolithography, Photoresist materials, Dielectrics, Laser ablation, Gold, Lithography, Nanostructures, Nanowires

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Proceedings Article | 11 September 2006 Paper

Paper

Laser-based rapid prototyping of plasmonic components

Carsten Reinhardt, Sven Passinger, Roman Kiyan, Andrey Stepanov, Boris Chichkov

Proceedings Volume 6323, 63230P (2006) https://doi.org/10.1117/12.680429

KEYWORDS: Two photon polymerization, Dielectrics, Plasmons, Gold, Glasses, Waveguides, Polymers, Femtosecond phenomena, Metals, Polymerization

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Proceedings Article | 31 August 2006 Paper

Paper

Fabrication technologies for chirped refractive microlens arrays

F. Wippermann, D. Radtke, U. Zeitner, J. Duparré, A. Tünnermann, M. Amberg, S. Sinzinger, C. Reinhardt, A. Ovsianikov, B. Chichkov

Proceedings Volume 6288, 62880O (2006) https://doi.org/10.1117/12.680585

KEYWORDS: Photomasks, Lithography, Two photon polymerization, Microlens array, Photoresist materials, Lenses, Prisms, Diffraction, Microlens, Surface roughness

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Proceedings Article | 20 April 2006 Paper

Paper

Toward femtosecond laser lithography

J. Koch, E. Fadeeva, A. Ostendorf, B. Chichkov

Proceedings Volume 6195, 61950F (2006) https://doi.org/10.1117/12.660775

KEYWORDS: Femtosecond phenomena, Photoresist materials, Laser ablation, Lithography, Optical lithography, Photomasks, Photoresist developing, Pulsed laser operation, Maskless lithography, Super resolution

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Proceedings Article | 20 April 2006 Paper

Paper

2D and 3D photonic and plasmonic structures fabricated by two-photon-polymerization

Sven Passinger, Carsten Reinhardt, Boris Chichkov

Proceedings Volume 6195, 61950U (2006) https://doi.org/10.1117/12.660659

KEYWORDS: Photonic crystals, Two photon polymerization, Photoresist materials, Plasmonics, Plasmons, Lawrencium, Dielectrics, Metals, Refractive index, Platinum

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Proceedings Article | 24 March 2006 Paper

Paper

Table-top EUV reflectometer

U. Hinze, B. Chichkov

Proceedings Volume 6151, 615136 (2006) https://doi.org/10.1117/12.656060

KEYWORDS: Reflectometry, Extreme ultraviolet, Grazing incidence, Reflectivity, Mirrors, Sensors, Precision measurement, Metrology, Diodes, Lithography

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Proceedings Article | 1 March 2006 Paper

Paper

Femtosecond laser lithography and applications

B. Chichkov, E. Fadeeva, J. Koch, A. Ostendorf, A. Ovsianikov, S. Passinger, C. Reinhardt

Proceedings Volume 6106, 610612 (2006) https://doi.org/10.1117/12.651664

KEYWORDS: Femtosecond phenomena, Photoresist materials, Two photon polymerization, Lithography, Polymers, Scanning electron microscopy, Tissues, Photonic crystals, Photosensitive materials, Laser systems engineering

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Proceedings Article | 6 May 2005 Paper

Paper

Off-synchrotron at-wavelength EUV metrology

Andre Egbert, Stefan Becker, Boris Chichkov

Proceedings Volume 5751, (2005) https://doi.org/10.1117/12.597411

KEYWORDS: Extreme ultraviolet, Silicon, Mirrors, Metrology, Calibration, Electrons, X-rays, Solids, Reflectivity, EUV optics

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Proceedings Article | 6 May 2005 Paper

Paper

Applications of an electron-based EUV source: table-top grazing incidence reflectometer and imaging with a Schwarzschild objective

U. Hinze, A. Egbert, B. Chichkov

Proceedings Volume 5751, (2005) https://doi.org/10.1117/12.598743

KEYWORDS: Extreme ultraviolet, Grazing incidence, Reflectometry, Mirrors, Objectives, Reflectivity, Plasmas, Diodes, Lithography, Metrology

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Proceedings Article | 6 May 2005 Paper

Paper

Ultrashort electron-based EUV and hard x-ray source

Ulf Hinze, Boris Chichkov

Proceedings Volume 5751, (2005) https://doi.org/10.1117/12.598745

KEYWORDS: X-rays, Copper, Picosecond phenomena, Diodes, Extreme ultraviolet, Femtosecond phenomena, Pulsed laser operation, Streak cameras, Laser energy, Hard x-rays

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SPIE Journal Paper | 1 May 2005

Direct-write subwavelength structuring with femtosecond laser pulses

Jürgen Koch, Frank Korte, Carsten Fallnich, Andreas Ostendorf, Boris Chichkov

OE, Vol. 44, Issue 05, 051103, (May 2005) https://doi.org/10.1117/12.10.1117/1.1904053

KEYWORDS: Femtosecond phenomena, Laser ablation, Nanostructuring, Nanolithography, Metals, Pulsed laser operation, Nanostructures, Diffraction, Laser applications, Laser damage threshold

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Proceedings Article | 12 April 2005 Open Access

Open Access

Paper

Femtosecond versus picosecond laser ablation

Andreas Ostendorf, Guenter Kamlage, Ulrich Klug, Frank Korte, Boris Chichkov

Proceedings Volume 5713, (2005) https://doi.org/10.1117/12.597975

KEYWORDS: Picosecond phenomena, Femtosecond phenomena, Laser systems engineering, Laser drilling, Laser cutting, Silicon, Semiconductor lasers, Semiconducting wafers, Pulsed laser operation, Scanning electron microscopy

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Proceedings Article | 21 March 2005 Paper

Paper

Electron-based ultrashort hard x-ray source

Ulf Hinze, Andre Egbert, Boris Chichkov, Klaus Eidmann

Proceedings Volume 5714, (2005) https://doi.org/10.1117/12.593387

KEYWORDS: X-rays, Copper, Picosecond phenomena, Diodes, Femtosecond phenomena, Pulsed laser operation, Streak cameras, Laser energy, Hard x-rays, X-ray characterization

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Proceedings Article | 23 December 2004 Paper

Paper

High-resolution direct-write femtosecond laser technologies

Jesper Serbin, Boris Chichkov

Proceedings Volume 5620, (2004) https://doi.org/10.1117/12.583144

KEYWORDS: Two photon polymerization, Polymers, Femtosecond phenomena, Photonic crystals, Glasses, Refractive index, Crystals, Scanning electron microscopy, Laser applications, Transmittance

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Proceedings Article | 3 November 2004 Paper

Paper

Electron-based microfocus soft-x-ray source and applications

Andre Egbert, Boris Tkachenko, Stefan Becker, Boris Chichkov

Proceedings Volume 5537, (2004) https://doi.org/10.1117/12.554894

KEYWORDS: Extreme ultraviolet, Silicon, Mirrors, Metrology, Electrons, Solids, Calibration, Microscopy, Silicon carbide, X-rays

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Proceedings Article | 3 November 2004 Paper

Paper

Temporal characteristics of an electron-based ultrashort hard x-ray source

Ulf Hinze, Andre Egbert, Boris Chichkov, Klaus Eidmann

Proceedings Volume 5537, (2004) https://doi.org/10.1117/12.557157

KEYWORDS: X-rays, Copper, Picosecond phenomena, Diodes, Pulsed laser operation, Femtosecond phenomena, Streak cameras, Laser energy, Hard x-rays, X-ray sources

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Proceedings Article | 18 October 2004 Paper

Paper

Compact debris-free EUV source for advanced mirror metrology

Andre Egbert, Boris Tkachenko, Stefan Becker, Boris Chichkov

Proceedings Volume 5533, (2004) https://doi.org/10.1117/12.554892

KEYWORDS: Extreme ultraviolet, Mirrors, Silicon, Metrology, Electrons, Solids, Reflectivity, Beryllium, X-rays, Extreme ultraviolet lithography

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Proceedings Article | 8 October 2004 Paper

Paper

Toward nanostructuring with femtosecond laser pulses

Juergen Koch, Takasumi Tanabe, Frank Korte, Carsten Fallnich, Andreas Ostendorf, Boris Chichkov

Proceedings Volume 5662, (2004) https://doi.org/10.1117/12.596773

KEYWORDS: Femtosecond phenomena, Nanostructuring, Nanolithography, Laser ablation, Metals, Nanostructures, Photons, Diffraction, Laser damage threshold, Laser systems engineering

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Proceedings Article | 20 September 2004 Open Access

Open Access

Paper

Nanostructuring of solids with femtosecond laser pulses (Keynote Address)

Andreas Ostendorf, Juergen Koch, Frank Korte, Boris Chichkov

Proceedings Volume 5448, (2004) https://doi.org/10.1117/12.546496

KEYWORDS: Femtosecond phenomena, Nanostructuring, Nanolithography, Laser ablation, Nanostructures, Metals, Solids, Photons, Laser applications, Photonic crystals

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Proceedings Article | 20 September 2004 Paper

Paper

Compact electron-based EUV source for at-wavelength metrology

Andre Egbert, Boris Tkachenko, Stefan Becker, Boris Chichkov

Proceedings Volume 5448, (2004) https://doi.org/10.1117/12.547029

KEYWORDS: Extreme ultraviolet, Mirrors, Silicon, Metrology, Electrons, Solids, Semiconducting wafers, Spectrographs, Reflectivity, Silicon carbide

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Proceedings Article | 20 May 2004 Paper

Paper

Debris-free low-cost commercial EUV source for at-wavelength metrology

Andre Egbert, Boris Tkachenko, Stefan Becker, Boris Chichkov

Proceedings Volume 5374, (2004) https://doi.org/10.1117/12.533019

KEYWORDS: Extreme ultraviolet, Mirrors, Silicon, Metrology, Semiconducting wafers, Spectrographs, Electrons, Silicon carbide, Optical filters, Reflectivity

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Proceedings Article | 20 May 2004 Paper

Paper

Metrology tools for EUV-source characterization and optimization

Thomas Missalla, Max Schuermann, Rainer Lebert, Christian Wies, Larissa Juschkin, Roman Klein, Frank Scholze, Gerhard Ulm, Andre Egbert, Boris Tkachenko, Boris Chichkov

Proceedings Volume 5374, (2004) https://doi.org/10.1117/12.556521

KEYWORDS: Calibration, Extreme ultraviolet, Sensors, Diodes, Metrology, Spectrographs, Optical filters, Extreme ultraviolet lithography, Transmittance, Mirrors

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Proceedings Article | 7 January 2004 Paper

Paper

Compact electron-based EUV and ultrashort hard x-ray sources

Andre Egbert, Boris Chichkov

Proceedings Volume 5196, (2004) https://doi.org/10.1117/12.499589

KEYWORDS: Extreme ultraviolet, Electrons, X-rays, Copper, Femtosecond phenomena, X-ray sources, Pulsed laser operation, Diodes, Silicon, Semiconductor lasers

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Proceedings Article | 12 December 2003 Paper

Paper

Amplification of acoustic oscillations by short laser pulses due to fast heating of electrons

Yuri Afanasiev, Boris Chichkov, Vladimir Isakov, Andrei Kanavin, Sergei Uryupin

Proceedings Volume 5228, (2003) https://doi.org/10.1117/12.537383

KEYWORDS: Electrons, Ions, Pulsed laser operation, Acoustics, Plasma, Absorption, High power lasers, Gas lasers, Laser scattering, Scattering

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Proceedings Article | 18 November 2003 Paper

Paper

Compact electron-based EUV source

Andre Egbert, Boris Tkachenko, Andreas Ostendorf, Stefan Becker, Boris Chichkov

Proceedings Volume 5063, (2003) https://doi.org/10.1117/12.540546

KEYWORDS: Extreme ultraviolet, Silicon, Electrons, Solids, Metrology, X-rays, Beryllium, X-ray technology, Calibration, Tungsten

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Proceedings Article | 14 November 2003 Paper

Paper

Three-dimensional nanostructuring of hybrid materials by two-photon polymerization

Jesper Serbin, Boris Chichkov, Ruth Houbertz

Proceedings Volume 5222, (2003) https://doi.org/10.1117/12.503792

KEYWORDS: Two photon polymerization, Polymers, Femtosecond phenomena, Polymerization, Liquids, Nanostructuring, Nanolithography, Absorption, Scanning electron microscopy, Ultraviolet radiation

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Proceedings Article | 2 September 2003 Paper

Paper

Intracavity laser processing of reflecting surfaces

Vladimir Osipov, Vasily Valyavko, Andreas Feld, Boris Chichkov, Dmitry Jakovlev

Proceedings Volume 5121, (2003) https://doi.org/10.1117/12.515571

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Proceedings Article | 19 June 2003 Paper

Paper

High-repetition-rate compact ultrashort x-ray source and applications

Andre Egbert, Boris Chichkov

Proceedings Volume 4978, (2003) https://doi.org/10.1117/12.473188

KEYWORDS: X-rays, Electrons, Femtosecond phenomena, Copper, Photons, X-ray sources, Diodes, Semiconductor lasers, X-ray detectors, Quantum efficiency

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Proceedings Article | 16 June 2003 Paper

Paper

Compact electron-based extreme-ultraviolet source at 13.5 nm

Andre Egbert, Bjoern Mader, Boris Tkachenko, Andreas Ostendorf, Boris Chichkov, Thomas Missalla, Max Schuermann, Kai Gaebel, Guido Schriever, Uwe Stamm

Proceedings Volume 5037, (2003) https://doi.org/10.1117/12.482366

KEYWORDS: Extreme ultraviolet, Electrons, Silicon, Solids, Beryllium, Photons, Molybdenum, Metrology, Spectrographs, Titanium

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Proceedings Article | 29 April 2003 Paper

Paper

Toward nanostructuring with femtosecond laser pulses

Frank Korte, Juergen Koch, Carsten Fallnich, Andreas Ostendorf, Boris Chichkov

Proceedings Volume 5118, (2003) https://doi.org/10.1117/12.498496

KEYWORDS: Femtosecond phenomena, Nanolithography, Metals, Nanostructuring, Laser applications, Nanostructures, Laser damage threshold, Laser ablation, Pulsed laser operation, Diffraction

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Proceedings Article | 29 April 2003 Paper

Paper

Three-dimensional nanostructuring by two-photon polymerization of hybrid materials

Jesper Serbin, Boris Chichkov

Proceedings Volume 5118, (2003) https://doi.org/10.1117/12.498936

KEYWORDS: Two photon polymerization, Polymers, Femtosecond phenomena, Liquids, Polymerization, Nanostructuring, Nanolithography, Absorption, Photonic crystals, Fabrication

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Proceedings Article | 15 April 2003 Paper

Paper

Three-dimensional microfabrication with femtosecond laser pulses

Jesper Serbin, R. Houbertz, Carsten Fallnich, Boris Chichkov

Proceedings Volume 4941, (2003) https://doi.org/10.1117/12.468235

KEYWORDS: Two photon polymerization, Femtosecond phenomena, Liquids, Polymers, Fabrication, Photonic crystals, Microfabrication, Absorption, Microscopes, 3D microstructuring

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SPIE Journal Paper | 1 April 2003

Compact electron-based extreme ultraviolet source at 13.5 nm

Andre Egbert, Bjoern Mader, Boris Tkachenko, Andreas Ostendorf, Carsten Fallnich, Boris Chichkov, Thomas Miflalla, Max Schuermann, Kai Gaebel, Guido Schriever, Uwe Stamm

JM3, Vol. 2, Issue 02, (April 2003) https://doi.org/10.1117/12.10.1117/1.1532350

KEYWORDS: Extreme ultraviolet, Electrons, Silicon, Solids, Beryllium, Photons, Metrology, X-rays, X-ray technology, Extreme ultraviolet lithography

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Proceedings Article | 23 October 2002 Paper

Paper

Compact high-repetition-rate femtosecond laser-driven hard-x-ray source

Andre Egbert, Bjoern Mader, Boris Chichkov, Jean-Pierre Girardeau-Montaut

Proceedings Volume 4781, (2002) https://doi.org/10.1117/12.450405

KEYWORDS: X-rays, Femtosecond phenomena, Laser systems engineering, Pulsed laser operation, Metals, Picosecond phenomena, Diodes, X-ray sources, Copper, Quantum efficiency

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SPIE Journal Paper | 1 October 2002

Femtosecond laser-driven x-ray tube

Andre Egbert, Boris Chichkov, Carsten Fallnich, S. Zimmermann, A. Reinhold

OE, Vol. 41, Issue 10, (October 2002) https://doi.org/10.1117/12.10.1117/1.1504459

KEYWORDS: X-rays, Femtosecond phenomena, Pulsed laser operation, Quantum efficiency, Metals, Photons, X-ray sources, X-ray lasers, Plasma, Laser energy

Proceedings Article | 13 September 2002 Paper

Paper

Deep drilling of metals by femtosecond laser pulses

Guenter Kamlage, Boris Chichkov, Andreas Ostendorf, Hans Toenshoff

Proceedings Volume 4760, (2002) https://doi.org/10.1117/12.482108

KEYWORDS: Femtosecond phenomena, Laser drilling, Metals, Pulsed laser operation, Laser ablation, Laser optics, Materials processing, Laser processing, Laser damage threshold, Laser applications

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Proceedings Article | 13 September 2002 Paper

Paper

Threshold characteristics of short and ultrashort laser pulse ablation of metals

Yuri Afanasiev, Nikolai Demchenko, Vladimir Isakov, Irina Zavestovskaia, Boris Chichkov

Proceedings Volume 4760, (2002) https://doi.org/10.1117/12.482112

KEYWORDS: Laser ablation, Metals, Ions, Laser damage threshold, Gold, Picosecond phenomena, Tellurium, Ultrafast phenomena, Femtosecond phenomena, Pulsed laser operation

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Proceedings Article | 13 September 2002 Paper

Paper

Generation of acoustic oscillations by short laser pulses in metals

Yuri Afanasiev, Boris Chichkov, Vladimir Isakov, Andrei Kanavin, Sergei Uryupin

Proceedings Volume 4760, (2002) https://doi.org/10.1117/12.482073

KEYWORDS: Electrons, Phonons, Ions, Metals, Heat flux, Plasma, Acoustics, Pulsed laser operation, Lithium, Convection

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Proceedings Article | 13 September 2002 Paper

Paper

Femtosecond laser ablation and nanostructuring

Boris Chichkov, Frank Korte, J. Koch, Stefan Nolte, Andreas Ostendorf

Proceedings Volume 4760, (2002) https://doi.org/10.1117/12.482099

KEYWORDS: Femtosecond phenomena, Laser ablation, Nanostructuring, Objectives, Pulsed laser operation, Nanolithography, Microscopes, Laser energy, Solids, Glasses

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Proceedings Article | 18 June 2002 Paper

Paper

Waveguides produced by ultrashort laser pulses inside glasses and crystals

Stefan Nolte, Matthias Will, Boris Chichkov, Andreas Tuennermann

Proceedings Volume 4637, (2002) https://doi.org/10.1117/12.470621

KEYWORDS: Waveguides, Crystals, Refractive index, Femtosecond phenomena, Laser crystals, Glasses, Near field, Silica, Transmission electron microscopy, Quartz

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Proceedings Article | 6 December 2001 Paper

Paper

Compact ultrashort-pulse laser-driven hard-x-ray tube

Andre Egbert, Boris Chichkov, Carsten Fallnich

Proceedings Volume 4502, (2001) https://doi.org/10.1117/12.449867

KEYWORDS: X-rays, Femtosecond phenomena, Pulsed laser operation, Metals, X-ray sources, Quantum efficiency, Plasmas, Laser energy, Laser systems engineering, Picosecond phenomena

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Proceedings Article | 29 June 2001 Paper

Paper

Submicron structuring of solid targets with femtosecond laser pulses

Frank Korte, Stefan Nolte, Boris Chichkov, Carsten Fallnich, Andreas Tuennermann, Herbert Welling

Proceedings Volume 4274, (2001) https://doi.org/10.1117/12.432502

KEYWORDS: Laser ablation, Femtosecond phenomena, Metals, Solids, Glasses, Pulsed laser operation, Laser energy, Laser damage threshold, Chromium, Near field scanning optical microscopy

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Proceedings Article | 16 August 2000 Paper

Paper

Extended two-temperature model of laser ablation of metals

Yuri Afanasiev, Boris Chichkov, Nikolai Demchenko, Vladimir Isakov, Irina Zavestovskaia

Proceedings Volume 4065, (2000) https://doi.org/10.1117/12.407320

KEYWORDS: Laser ablation, Metals, Ions, Tellurium, Data modeling, Gold, Laser damage threshold, Computer simulations, Motion models, Plasma

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Proceedings Article | 16 August 2000 Paper

Paper

Laser ablation of organic materials: hydrodynamic model

Irina Zavestovskaia, Yuri Afanasiev, Boris Chichkov, Vladimir Isakov

Proceedings Volume 4065, (2000) https://doi.org/10.1117/12.407323

KEYWORDS: Polymers, Laser ablation, Etching, Ultraviolet radiation, Absorption, Pulsed laser operation, Solids, Organic materials, Polonium, Information operations

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Proceedings Article | 1 February 2000 Paper

Paper

Ablation of metals by ultrashort laser pulses: theoretical modeling and computer simulations

Yuri Afanasiev, Boris Chichkov, Nikolai Demchenko, Vladimir Isakov, Andrei Kanavin, Sergei Uryupin, Irina Zavestovskaia

Proceedings Volume 3885, (2000) https://doi.org/10.1117/12.376971

KEYWORDS: Laser ablation, Metals, Ions, Ultrafast phenomena, Plasma, Computer simulations, Pulsed laser operation, Ionization, Wave propagation, Thermal modeling

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Proceedings Article | 1 February 2000 Paper

Paper

Hydrodynamic regime of laser ablation of metals by ultrashort laser pulses of low fluence

Irina Zavestovskaia, Yuri Afanasiev, Boris Chichkov, Nikolai Demchenko, Vladimir Isakov

Proceedings Volume 3885, (2000) https://doi.org/10.1117/12.376995

KEYWORDS: Ions, Metals, Laser ablation, Tellurium, Gold, Data modeling, Picosecond phenomena, Ultrafast phenomena, Plasma, Computer simulations

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Proceedings Article | 1 February 2000 Paper

Paper

Thermal regime of laser ablation of metals by ultrashort pulses of low fluences

Vladimir Isakov, Yuri Afanasiev, Boris Chichkov, Andrei Kanavin, Sergei Uryupin

Proceedings Volume 3885, (2000) https://doi.org/10.1117/12.376994

KEYWORDS: Metals, Laser ablation, Tellurium, Picosecond phenomena, Ions, Ultrafast phenomena, Gold, Energy transfer, Cerium, Absorption

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Proceedings Article | 1 February 2000 Paper

Paper

Heat transport in metals irradiated by ultrashort laser pulses

Andrei Kanavin, Yuri Afanasiev, Boris Chichkov, Vladimir Isakov, Igor Smetanin

Proceedings Volume 3885, (2000) https://doi.org/10.1117/12.376993

KEYWORDS: Pulsed laser operation, Metals, Tellurium, Electron transport, Convection, Ultrafast phenomena, Femtosecond phenomena, Fermium, Diffusion, Gold

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Proceedings Article | 5 March 1999 Paper

Paper

Acoustic waves in metals irradiated by ultrashort laser pulses

Sergei Uryupin, Andrei Kanavin, Yu. Afansiev, Vladimir Isakov, Boris Chichkov

Proceedings Volume 3735, (1999) https://doi.org/10.1117/12.341481

KEYWORDS: Metals, Heat flux, Phonons, Ultrafast phenomena, Acoustics, Physics, Convection, Femtosecond phenomena, Pulsed laser operation, Electron transport

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Proceedings Article | 6 May 1996 Paper

Paper

Generation of coherent VUV and XUV radiation

Bernd Wellegehausen, H. Eichmann, S. Meyer, Carsten Momma, Kasem Mossavi, Herbert Welling, Boris Chichkov

Proceedings Volume 2796, (1996) https://doi.org/10.1117/12.239736

KEYWORDS: Vacuum ultraviolet, Extreme ultraviolet, Ions, Laser systems engineering, Xenon, Ionization, Sapphire lasers, X-rays, Oxygen, Tunable lasers

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Showing 5 of 78 publications

Conference Committee Involvement (6)

Optical Methods for Inspection, Characterization, and Imaging of Biomaterials

15 May 2013 | Munich, Germany

SPIE Smart Nano-Micro Materials and Devices

5 December 2011 | Melbourne, Australia

High-Power Laser Ablation VII

20 April 2008 | Taos, New Mexico, United States

Laser Applications in Microelectronic and Optoelectronic Manufacturing XII

22 January 2007 | San Jose, California, United States

Photonics North 2006

19 June 2006 | Quebec City, Canada

Showing 5 of 6 Conference Committees

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