Prof. Borivoje Nikolic Profile

Prof. Borivoje Nikolic

at Univ of California Berkeley

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Author

Publications (8)

Proceedings Article | 3 April 2010 Paper

Hardware implementation of Block GC3 lossless compression algorithm for direct-write lithography systems

Hsin-I Liu, Brian Richards, Avideh Zakhor, Borivoje Nikolic

Proceedings Volume 7637, 763716 (2010) https://doi.org/10.1117/12.846447

KEYWORDS: Image compression, Field programmable gate arrays, Computer programming, Image segmentation, Direct write lithography, Clocks, Error control coding, Raster graphics, Lithography, Semiconducting wafers

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Future lithography systems must produce chips with smaller feature sizes, while maintaining throughput comparable to today's optical lithography systems. This places stringent data handling requirements on the design of any direct-write maskless system. To achieve the throughput of one wafer layer per minute with a direct-write maskless lithography system, using 22 nm pixels for 45 nm technology, a data rate of 12 Tb/s is required. In our past research, we have developed a datapath architecture for direct-write lithography systems, and have shown that lossless compression plays a key role in reducing throughput requirements of such systems. Our approach integrates a low complexity hardware-based decoder with the writers, in order to decode a compressed data layer in real time on the fly. In doing so, we have developed a spectrum of lossless compression algorithms for integrated circuit rasterized layout data to provide a tradeoff between compression efficiency and hardware complexity, the most promising of which is Block Golomb Context Copy Coding (Block GC3). In this paper, we present the synthesis results of the Block GC3 decoder for both FPGA and ASIC implementations. For one Block GC3 decoder, 3233 slice flip-flops and 3086 4-input LUTs are utilized in a Xilinx Virtex II Pro 70 FPGA, which corresponds to 4% of its resources, along with 1.7 KB of internal memory. The system runs at 100 MHz clock rate, with the overall output rate of 495 Mb/s for a single decoder. The corresponding ASIC implementation results in a 0.07 mm² design with the maximum output rate of 2.47 Gb/s. In addition to the decoder implementation results, we discuss other hardware implementation issues for the writer system data path, including on-chip input/output buffering, error propagation control, and input data stream packaging. This hardware data path implementation is independent of the writer systems or data link types, and can be integrated with arbitrary directwrite lithography systems.

Proceedings Article | 13 March 2009 Paper

Parameter-specific electronic measurement and analysis of sources of variation using ring oscillators

Lynn T.-N. Wang, Liang-Teck Pang, Andrew Neureuther, Borivoje Nikolić

Proceedings Volume 7275, 72750L (2009) https://doi.org/10.1117/12.814227

KEYWORDS: Oscillators, Diffusion, Lithography, Etching, Structural design, Transistors, Visualization, Photomasks, Capacitance, Capacitors

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Proceedings Article | 6 March 2009 Paper

Hierarchical modeling of spatial variability with a 45nm example

Kun Qian, Borivoje Nikolić, Costas Spanos

Proceedings Volume 7275, 727505 (2009) https://doi.org/10.1117/12.814226

KEYWORDS: Semiconducting wafers, Device simulation, Data modeling, Optical proximity correction, Transistors, Instrument modeling, Statistical analysis, Critical dimension metrology, Light, Oscillators

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Proceedings Article | 18 March 2008 Paper

Hypersensitive parameter-identifying ring oscillators for lithography process monitoring

Lynn Wang, Wojtek Poppe, Liang-Teck Pang, Andrew Neureuther, Elad Alon, Borivoje Nikolic

Proceedings Volume 6925, 69250P (2008) https://doi.org/10.1117/12.773184

KEYWORDS: Oscillators, Lithography, Device simulation, Design for manufacturing, Transistors, Phase shifts, Semiconducting wafers, Instrument modeling, Manufacturing, Circuit switching

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SPIE Journal Paper | 1 January 2007

Reduced complexity compression algorithms for direct-write maskless lithography systems

Hsin-I Liu, Vito Dai, Avideh Zakhor, Borivoje Nikolic

JM3, Vol. 6, Issue 01, 013007, (January 2007) https://doi.org/10.1117/12.10.1117/1.2435202

KEYWORDS: Image segmentation, Computer programming, Image compression, Maskless lithography, Binary data, Raster graphics, Semiconducting wafers, Photomasks, Multiplexers, Lithography

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Proceedings Article | 24 March 2006 Paper

Reduced complexity compression algorithms for direct-write maskless lithography systems

Hsin-I Liu, Vito Dai, Avideh Zakhor, Borivoje Nikolic

Proceedings Volume 6151, 61512B (2006) https://doi.org/10.1117/12.656844

KEYWORDS: Image segmentation, Computer programming, Maskless lithography, Binary data, Multiplexers, Raster graphics, Semiconducting wafers, Image compression, Lithography, Image processing

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Proceedings Article | 20 May 2004 Paper

Mixed-signal data interface for maskless lithography

Benjamin Warlick, Borivoje Nikolic

Proceedings Volume 5374, (2004) https://doi.org/10.1117/12.536043

KEYWORDS: Mirrors, Semiconducting wafers, Analog electronics, Extreme ultraviolet, Interfaces, Lithography, Transistors, Micromirrors, Capacitance, Photomasks

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Proceedings Article | 20 May 2004 Paper

Layout decompression chip for maskless lithography

Borivoje Nikolic, Ben Wild, Vito Dai, Yashesh Shroff, Benjamin Warlick, Avideh Zakhor, William Oldham

Proceedings Volume 5374, (2004) https://doi.org/10.1117/12.535878

KEYWORDS: Maskless lithography, Mirrors, Lithography, Semiconducting wafers, Simulink, Prototyping, Data compression, Photomasks, Interfaces, Micromirrors

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Showing 5 of 8 publications

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