CONFERENCE PROCEEDINGS
Advanced Search
Brian Hoang
at Donaldson Co Inc
SPIE Involvement:
Author
Publications (5)
Proceedings Article | 13 March 2018 Paper
Improved airborne molecular contaminant filter performance for photolithography
Gerald Weineck, Brian Hoang, Joshua Lais
Proceedings Volume 10586, 105861A (2018) https://doi.org/10.1117/12.2297034
KEYWORDS: Carbon, Silicon, Optical lithography, Semiconductors, Contamination, Gases, Chemistry, Lithography
Proceedings Article | 24 March 2006 Paper
An investigation of the removal of 1-Methyl-2-Pyrrolidinone (NMP)
Andrew Dallas, Lefei Ding, Jon Joriman, Brian Hoang, Kevin Seguin, Dustin Zastera
Proceedings Volume 6152, 61523R (2006) https://doi.org/10.1117/12.654839
KEYWORDS: Adsorption, Carbon, Ions, Statistical analysis, FT-IR spectroscopy, Hydrogen, Natural surfaces, Semiconductors, Ion exchange, Humidity
Proceedings Article | 10 May 2005 Paper
Removal of low concentrations of acid gases: issues and solutions
Andrew Dallas, Lefei Ding, Jeremy Exley, Jon Joriman, Brian Hoang, Jonathan Parsons, Kevin Seguin, Dustin Zastera
Proceedings Volume 5752, (2005) https://doi.org/10.1117/12.599815
KEYWORDS: Gases, Carbon, Humidity, Sensors, Contamination, Lithography, Network architectures, Fluctuations and noise, Ions, Industrial chemicals
Proceedings Article | 24 May 2004 Paper
Are ambient SO2 levels a valid indicator of projected acid gas filter life?
Andrew Dallas, Lefei Ding, Jon Joriman, Brian Hoang, Jonathan Parsons, Kevin Seguin
Proceedings Volume 5375, (2004) https://doi.org/10.1117/12.534102
KEYWORDS: Gases, Chemical analysis, Manufacturing, Carbon, Industrial chemicals, Oxides, Nitrogen, Adsorption, Ions, Sulfur
Proceedings Article | 26 June 2003 Paper
New concerns with the design of filters for the protection of lithography optics
Andrew Dallas, William Ding, Brian Hoang, Jon Joriman, Jonathan Parsons, Kevin Seguin
Proceedings Volume 5040, (2003) https://doi.org/10.1117/12.485416
KEYWORDS: Directed energy weapons, Humidity, Sulfur, Contamination, Optical filters, Sensors, Manufacturing, Adsorption, Semiconducting wafers, Lithography
SIGN IN TO:
  • View contact details
UPDATE YOUR PROFILE
Is this your profile? Update it now.
Sign into your SPIE.org account
Don’t have a profile and want one?
Create an account on SPIE.org
Advertisement
Advertisement
Back to Top