Dr. Chang Hoon Lee Profile

Dr. Chang Hoon Lee

at S&S TECH

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Publications (2)

Proceedings Article | 11 November 2022 Presentation

Full size EUV pellicle development for high power

Juhee Hong, Haena Lee, Yesong Kim, Donghoi Kim, Munsu Choi, Seungjo Lee, Byeong Sung Yu, Chulkyun Park, Min Wook Jung, Chang Hoon Lee, Byoung Hoon Seung, Cheol Shin

Proceedings Volume PC12292, PC122920E (2022) https://doi.org/10.1117/12.2641755

KEYWORDS: Pellicles, Extreme ultraviolet lithography, Extreme ultraviolet, Transmittance, Yield improvement, Spectroscopy, Semiconductors, Semiconducting wafers, Photomasks, Particles

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Proceedings Article | 3 October 2018 Presentation + Paper

Development of full-size EUV pellicle with thermal emission layer coating

Juhee Hong, Chulkyun Park, Changhun Lee, Keesoo Nam, Yongju Jang, Seongju Wi, Jinho Ahn

Proceedings Volume 10809, 108090R (2018) https://doi.org/10.1117/12.2501772

KEYWORDS: Pellicles, Extreme ultraviolet, Extreme ultraviolet lithography, Silicon, Ruthenium, Transmittance, Coating, Reticles, Absorption, Ultraviolet radiation

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