Dr. Carlos Errando-Herranz Profile

Dr. Carlos Errando-Herranz

Postdoc Researcher at Massachusetts Institute of Technology

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Publications (6)

Proceedings Article | 5 March 2022 Presentation + Paper

Wafer scale fabrication of silicon nitride MEMS phase shifters with XeF2 dry vapor release etch process

Karl McNulty, Matthew van Niekerk, Venkatesh Deenadayalan, Carlos Errando-Herranz, Marcel Pruessner, Michael Fanto, Stefan Preble

Proceedings Volume 12006, 120060C (2022) https://doi.org/10.1117/12.2606849

KEYWORDS: Phase shifts, Waveguides, Microelectromechanical systems, Etching, Silicon, Semiconducting wafers, Vapor etching, Electrodes, Analytical research, Resonators

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Proceedings Article | 8 March 2021 Presentation

Compact and low power silicon photonic components based on MEMS

Kristinn Gylfason, Pierre Edinger, Carlos Errando-Herranz, Alain Takabayashi, Hamed Sattari, Niels Quack, Peter Verheyen, Wim Bogaerts

Proceedings Volume 11697, 116970Y (2021) https://doi.org/10.1117/12.2582947

KEYWORDS: Silicon photonics, Microelectromechanical systems, Silicon, Photonic integrated circuits, Phase shifts, Actuators, Waveguides, Wafer-level optics, Transceivers, Semiconducting wafers

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Proceedings Article | 8 March 2021 Presentation

Optical gas sensing in the mid-IR using suspended silicon waveguides

Kristinn Gylfason, Floria Ottonello-Briano, Carlos Errando-Herranz, Henrik Rödjegård, Hans Martin, Hans Sohlström

Proceedings Volume 11689, 116890A (2021) https://doi.org/10.1117/12.2580648

KEYWORDS: Mid-IR, Silicon, Waveguides, Optical sensing, Spectroscopy, Integrated optics, Optical spectroscopy, Microelectromechanical systems, Chemical analysis, Carbon

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Proceedings Article | 20 August 2020 Presentation

On-chip single photon emission from a waveguide-coupled two-dimensional semiconductor

Carlos Errando-Herranz, Eva Schöll, Raphael Picard, Micaela Laini, Samuel Gyger, Ali Elshaari, Artur Branny, Ulrika Wennberg, Mauro Brotons I Gisbert, Cristian Bonato, Brian Gerardot, Valery Zwiller, Klaus Jöns

Proceedings Volume 11471, 1147105 (2020) https://doi.org/10.1117/12.2567240

KEYWORDS: Single photon, Waveguides, Semiconductors, Photonic integrated circuits, Quantum communications, Quantum information, Quantum information processing, Light sources, Photonic devices

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Proceedings Article | 26 February 2020 Presentation + Paper

MORPHIC: programmable photonic circuits enabled by silicon photonic MEMS

Wim Bogaerts, Hamed Sattari, Pierre Edinger, Alain Yuji Takabayashi, Iman Zand, Xiaojing Wang, Antonio Ribeiro, Moises Jezzini, Carlos Errando-Herranz, Giuseppe Talli, Kumar Saurav, Marco Garcia Porcel, Peter Verheyen, Banafsheh Abasahl, Frank Niklaus, Niels Quack, Kristinn Gylfason, Peter O'Brien, Umar Khan

Proceedings Volume 11285, 1128503 (2020) https://doi.org/10.1117/12.2540934

KEYWORDS: Microelectromechanical systems, Waveguides, Photonic integrated circuits, Silicon photonics, Electronics, Actuators, Packaging

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Proceedings Article | 22 February 2018 Presentation + Paper

New dynamic silicon photonic components enabled by MEMS technology

Carlos Errando-Herranz, Pierre Edinger, Marco Colangelo, Joel Björk, Samy Ahmed, Göran Stemme, Frank Niklaus, Kristinn Gylfason

Proceedings Volume 10537, 1053711 (2018) https://doi.org/10.1117/12.2297588

KEYWORDS: Waveguides, Microelectromechanical systems, Silicon, Silicon photonics, Dispersion, Resonators, Etching, Tunable filters, Dry etching, Integrated optics

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Showing 5 of 6 publications

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