Ms. Carolien Boeckx Profile

Carolien Boeckx

at imec

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Publications (2)

Proceedings Article | 24 March 2016 Paper

Next generation of decision making software for nanopatterns characterization: application to semiconductor industry

A. Dervilllé, A. Labrosse, Y. Zimmermann, J. Foucher, R. Gronheid, C. Boeckx, A. Singh, P. Leray, S. Halder

Proceedings Volume 9778, 977836 (2016) https://doi.org/10.1117/12.2219378

KEYWORDS: Metrology, Algorithm development, Software development, Data modeling, Image processing, Semiconductors, Scanning electron microscopy, Image analysis, Data analysis, Process control

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Proceedings Article | 18 March 2016 Paper

EUV patterned templates with grapho-epitaxy DSA at the N5/N7 logic nodes

Roel Gronheid, Carolien Boeckx, Jan Doise, Joost Bekaert, Ioannis Karageorgos, Julien Ruckaert, Boon Teik Chan, Chenxi Lin, Yi Zou

Proceedings Volume 9776, 97761W (2016) https://doi.org/10.1117/12.2219876

KEYWORDS: Directed self assembly, Extreme ultraviolet, Optical lithography, Lithography, Extreme ultraviolet lithography, Logic, Scanners, Etching, Immersion lithography, Stochastic processes, Personal protective equipment, Photomasks, Scanning electron microscopy, Metrology

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