Optical meta-devices using metasurfaces have shown preeminent capabilities to control the optical nonlinearity and enhancing the nonlinear efficiency by arrangements of meta-atoms. With the great advantages of relaxed phase-matching requirements and CMOS compatibility for mass production, nonlinear metasurfaces can flexibly manipulate the phase, amplitude and polarization of the nonlinear waves at subwavelength scale. Various nonlinear frequency conversion processes, such as second harmonic generation (SHG), third harmonic generation (THG), have been widely realized to short wavelength such as vacuum ultraviolet (VUV) light and applied in optical communication, imaging, photochemistry and biosensing. The design, fabrication and application of the novel nonlinear optical meta-devices are reported in this talk.
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