Dr. Catherine Burcklen
at Lawrence Livermore National Lab.
SPIE Involvement:
Author
Publications (2)

Proceedings Article | 28 April 2023 Presentation + Paper
Proceedings Volume 12494, 1249409 (2023) https://doi.org/10.1117/12.2660664
KEYWORDS: Refractive index, Transmittance, Chromium, Extreme ultraviolet, Thin films, Reflectivity, Contamination, Film thickness, Multilayers

Proceedings Article | 5 June 2018 Paper
Proceedings Volume 10691, 106910U (2018) https://doi.org/10.1117/12.2314257
KEYWORDS: Reflectivity, Multilayers, Silicon, Interfaces, X-rays, Molybdenum, Silicon carbide, Data modeling, Systems modeling

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