Mr. Chang-Il Choi Profile

Chang-Il Choi

at ASML

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Publications (1)

Proceedings Article | 22 April 2024 Poster + Paper

Advanced pattern selection and coverage check for computational lithography

Keonwoo Bae, Taekyum Kim, Sanghwa Lee, Bongkeun Kim, Seongtae Jeong, Jenny Tang, Qian Zhao, Yiqiong Zhao, Chang-Il Choi, Jiao Liang, Uwe Paul Schroeder, Mark Simmons

Proceedings Volume 12957, 129571M (2024) https://doi.org/10.1117/12.3009845

KEYWORDS: Calibration, Optical proximity correction, Extreme ultraviolet, Data modeling, Education and training, Performance modeling, Advanced patterning, Metrology, Machine learning, Databases

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