Ms. CHARU SARDANA Profile

CHARU SARDANA

SR. MTS at Intel Corporation

SPIE Involvement:

Author

Publications (2)

SPIE Journal Paper | 12 August 2015

Comparison between e-beam direct write and immersion lithography for 20-nm node

Charu Sardana, Dale Ibbotson, Aurélien Fay, Pieter Brandt, Marco Wieland

JM3, Vol. 14, Issue 03, 031214, (August 2015) https://doi.org/10.1117/12.10.1117/1.JMM.14.3.031214

KEYWORDS: Electron beam direct write lithography, Photovoltaics, Lithium, Immersion lithography, Electron beam lithography, Lithography, Electronic design automation, Field programmable gate arrays, Metals, Optical proximity correction

Read Abstract +

Proceedings Article | 19 March 2015 Paper

Comparison between e-beam direct write and immersion lithography for 20nm node

Pieter Brandt, Charu Sardana, Dale Ibbotson, Marco Wieland, Aurélien Fay

Proceedings Volume 9423, 942311 (2015) https://doi.org/10.1117/12.2085500

KEYWORDS: Electron beam direct write lithography, Photovoltaics, Electron beam lithography, Lithography, Photomasks, Metals, Critical dimension metrology, Electronic design automation, Optical proximity correction, Field programmable gate arrays

Read Abstract +

View contact details

UPDATE YOUR PROFILE

Is this your profile? Update it now.

Sign into your SPIE.org account

Don’t have a profile and want one?

Create an account on SPIE.org

Keywords/Phrases

Search In:

Publication Years