Dr. Cheng-Hung Chen Profile

Dr. Cheng-Hung Chen

Principal Engineer at Taiwan Semiconductor Manufacturing Co Ltd

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Publications (4)

Proceedings Article | 9 September 2013 Paper

Impact of proximity model inaccuracy on patterning in electron beam lithography

Cheng-Hung Chen, Tsung-Chih Chien, P. Liu, W. C. Wang, J. Shin, S. Lin, Burn Lin

Proceedings Volume 8880, 888014 (2013) https://doi.org/10.1117/12.2029180

KEYWORDS: Scattering, Electron beam lithography, Data modeling, Laser scattering, Critical dimension metrology, Monte Carlo methods, Backscatter, Photomasks, Lithography, Electron beams

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Proceedings Article | 26 March 2013 Paper

Influence of data volume and EPC on process window in massively parallel e-beam direct write

Shy-Jay Lin, Pei-Yi Liu, Cheng-Hung Chen, Wen-Chuan Wang, Jaw-Jung Shin , Burn Jeng Lin, Mark McCord, Sameet Shriyan

Proceedings Volume 8680, 86801C (2013) https://doi.org/10.1117/12.2010865

KEYWORDS: Electroluminescence, Raster graphics, Scattering, Monte Carlo methods, Silica, Diffusion, Laser scattering, Quantization, Modulation transfer functions, Backscatter

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Proceedings Article | 3 January 2005 Paper

A general-purpose development kit for optical storage system design

Cheng-Hung Chen, Jia-Yush Yen, Chung-Yin Huang, Feng-Hsiang Lo

Proceedings Volume 5643, (2005) https://doi.org/10.1117/12.575918

KEYWORDS: Digital signal processing, Field programmable gate arrays, Servomechanisms, Analog electronics, Actuators, Signal processing, Control systems, Optical design, Algorithm development, Optical discs

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Proceedings Article | 3 January 2005 Paper

A new optical disk driver fine-seek algorithm based on runout learning

Cheng-Hung Chen, Jia-Yush Yen

Proceedings Volume 5643, (2005) https://doi.org/10.1117/12.575902

KEYWORDS: Actuators, Detection and tracking algorithms, Head, Optical tracking, Servomechanisms, Optical discs, Spindles, Mathematical modeling, Computer simulations, Motion estimation

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