Dr. Cheng Chen Profile

Dr. Cheng Chen

Student at Shanghai jiaotong University

SPIE Involvement:

Author

Publications (1)

This will count as one of your downloads.

You will have access to both the presentation and article (if available).

DOWNLOAD NOW

This content is available for download via your institution's subscription. To access this item, please sign in to your personal account.

Email or Username Forgot your username?

Password Forgot your password?

Show

Keep me signed in

No SPIE account? Create an account

Proceedings Article | 7 March 2019 Paper

Corrected differential fitting for height extraction in chromatic confocal microscopy

Cheng Chen, WenJun Yang, Hong Zhu, Jian Fu, Chi Zhang, Jian Wang, XiaoJun Liu, Wenlong Lu, Xiangqian Jiang

Proceedings Volume 11053, 1105322 (2019) https://doi.org/10.1117/12.2511734

KEYWORDS: Error analysis, Confocal microscopy, Sensors, Algorithm development, Monte Carlo methods, Metrology

Read Abstract +

As for chromatic confocal sensor system with limited computational capacity, a fast peak extraction algorithm with considerate accuracy is in urgent demand. However, current peak extraction algorithms such as the centroid algorithm (CA) and nonlinear fitting algorithms can not balance the accuracy and computational efficiency. Thus, we propose an accurate peak extraction algorithm with good computational efficiency called corrected differential fitting algorithm (CDFA). At first, the differential signal derived from the original axial response signal is linearly fitted for initial peak extraction. Then corresponding systematic error of this linear fitting operation is analyzed using a first-order linear nonhomogeneous differential equation. At last, error compensation, that is, the solution to this equation is implemented with an introduction of "sum differences of sampling intensity". The performance of CDFA is compared with two conventional peak extraction algorithms including the CA and Gaussian fitting algorithm (GFA) using Monte Carlo simulations. CDFA is found to have a comparable accuracy performance with GFA while have a much higher computational efficiency.

My Library

You currently do not have any folders to save your paper to! Create a new folder below.

Folder Name

Folder Description

View contact details

UPDATE YOUR PROFILE

Is this your profile? Update it now.

Sign into your SPIE.org account

Don’t have a profile and want one?

Create an account on SPIE.org

Access to the requested content is limited to institutions that have purchased or subscribe to SPIE eBooks. You are receiving this notice because your organization may not have SPIE eBooks access.*

*Shibboleth/Open Athens users─please sign in to access your institution's subscriptions.

To obtain this item, you may purchase the complete book in print or electronic format on SPIE.org.

ORGANIZATIONAL
Sign in with credentials provided by your organization.

Organizational Username

Organizational Password

Show/Hide Password

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

;

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available

Members:

Non-members: ADD TO CART

Keywords/Phrases

Search In:

Publication Years