Dr. Chi-Yuan Lee Profile

Dr. Chi-Yuan Lee

Associate Professor at Yuan Ze Univ

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Author

Publications (6)

SPIE Journal Paper | 1 July 2009

Electromechanical behavior of the curled cantilever beam

Wan-Chun Chuang, Yuh-Chung Hu, Chi-Yuan Lee, Wen-Pin Shih, Pei-Zen Chang

JM3, Vol. 8, Issue 03, 033020, (July 2009) https://doi.org/10.1117/12.10.1117/1.3158355

KEYWORDS: Capacitance, Aluminum, Microelectromechanical systems, Roads, Electromechanical design, Mechanical engineering, Beam analyzers, Instrument modeling, Manufacturing, Finite element methods

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SPIE Journal Paper | 1 April 2009

Development of 2.4-GHz film bulk acoustic wave filter for wireless communication

Chi-Ming Fang, Shih-Yung Pao, Chi-Yuan Lee, Yi-Chang Lu, Pei-Yen Chen, Yung-Chung Chin, Pei-Zen Chang

JM3, Vol. 8, Issue 02, 021121, (April 2009) https://doi.org/10.1117/12.10.1117/1.3094749

KEYWORDS: Acoustics, Wireless communications, Resonators, Device simulation, Image filtering, Radio frequency circuits, Circuit switching, Electrodes, Roads, Signal attenuation

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Proceedings Article | 16 August 2004 Paper

Fabrication of micro-optical switch by post-CMOS micromachining process

Ying-Chou Cheng, Chi-Yuan Lee, Ching-Liang Dai, Wen-Jong Chen, Pei-Zen Chang, Ping-Hei Chen

Proceedings Volume 5455, (2004) https://doi.org/10.1117/12.545307

KEYWORDS: Micromirrors, Switches, Mirrors, Switching, Etching, Micromachining, Silica, Demultiplexers, Metals, Microelectromechanical systems

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Proceedings Article | 16 August 2004 Paper

Real-time monitoring of thickness of silicon membrane during wet etching using a novel surface acoustic wave sensor

Chi-Yuan Lee, Tsung-Tsong Wu, Yung-Yu Chen, Ying-Chou Cheng, Wen-Jong Chen, Shih-Yung Pao, Pei-Zen Chang, Ping-Hei Chen, Kai-Hsiang Yen, Fu-Yuan Xiao

Proceedings Volume 5455, (2004) https://doi.org/10.1117/12.544959

KEYWORDS: Silicon, Acoustics, Wet etching, Zinc oxide, Wave sensors, Etching, Microelectromechanical systems, Liquids, Sensors, Transducers

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Proceedings Article | 21 June 2000 Paper

Micro-electro-mechanical bandpass filters for signal processing by standard CMOS process

Tsungwei Huang, Peizen Chang, ChiYuan Lee, Fuyuan Xiao

Proceedings Volume 3990, (2000) https://doi.org/10.1117/12.388923

KEYWORDS: Metals, Signal processing, Microelectromechanical systems, Filtering (signal processing), Plasma etching, Etching, Resonators, Bandpass filters, Silicon, Dry etching

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Showing 5 of 6 publications

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