Dr. Chie Matsubara Profile

Dr. Chie Matsubara

at Osaka Univ

SPIE Involvement:

Author

Publications (1)

Proceedings Article | 29 March 2006 Paper

Minoru Toriumi, Chie Matsubara, Akihiko Otoguro, Toshiro Itani

Proceedings Volume 6153, 615311 (2006) https://doi.org/10.1117/12.656208

KEYWORDS: Diffusion, Polymers, Immersion lithography, Polymer thin films, Water, Solids, Liquids, Molecules, Lithography, Crystals

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Keywords/Phrases