Mr. Chin-Boon Tan Profile

Chin-Boon Tan

SPIE Involvement:

Author

Publications (2)

Proceedings Article | 10 May 2005 Paper

Modeling of wafer alignment marks using geometrical theory of diffraction (GTD)

Chin Tan, Swee Yeo, Andrew Khoh

Proceedings Volume 5752, (2005) https://doi.org/10.1117/12.599252

KEYWORDS: Diffraction, Optical alignment, Semiconducting wafers, Polarization, Diffraction gratings, Reflection, Solids, Silicon, Optical lithography, Ray tracing

Read Abstract +

Proceedings Article | 2 June 2003 Paper

Evaluation of alignment marks using ASML ATHENA alignment system in 90-nm BEOL process

Chin-Boon Tan, Swee-Hock Yeo, Hui Peng Koh, Chee Koo, Yee Foong, Yong Siew

Proceedings Volume 5038, (2003) https://doi.org/10.1117/12.487734

KEYWORDS: Semiconducting wafers, Optical alignment, Metals, Scanning probe microscopy, Overlay metrology, Scanners, Back end of line, Chemical mechanical planarization, Signal detection, Sensors

Read Abstract +

View contact details

UPDATE YOUR PROFILE

Is this your profile? Update it now.

Sign into your SPIE.org account

Don’t have a profile and want one?

Create an account on SPIE.org

Keywords/Phrases

Search In:

Publication Years