Ching-Chen Hao
at Taiwan Semiconductor Manufacturing Co Ltd
SPIE Involvement:
Author
Publications (1)

Proceedings Article | 10 July 2003 Paper
Ching-Chen Hao, Min-Hwa Chi, Chao-Chi Chen, Hung-Jen Lin, Yu-Fang Lin, C. Hsieh, Chih-Hsiung Lee, Kuang-Hui Chang, H. Wu, Chin-Heng Shen
Proceedings Volume 5042, (2003) https://doi.org/10.1117/12.485249
KEYWORDS: Transistors, Silicon, Oxides, Chlorine, CMOS technology, Interfaces, Amplifiers, Semiconducting wafers, Annealing, Oxidation

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