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Christelle Segur
at STMicroelectronics S.A.
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Publications (1)
Proceedings Article | 1 December 2022 Poster + Paper
Single-pass frame generation for multi-layer 3D circuits
Frederic Brault, Philippe Morey, Samuel Boret, Benedicte Bry, Ghislaine Castel, Antonio Marques, Julien Rouessard, Christelle Segur
Proceedings Volume 12293, 122930Q (2022) https://doi.org/10.1117/12.2641690
KEYWORDS: Semiconducting wafers, Sensors, Optical alignment, Imaging systems, Silicon, Process control, Photomasks
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