Mr. Christine Das Profile

Christine Das

at Lam Research Corp

SPIE Involvement:

Author

Publications (1)

Proceedings Article | 30 April 2023 Presentation

Seung Park, Yong Hee Choi, David Lo, Mark Kawaguchi, Christine Das

Proceedings Volume PC12499, PC124990C (2023) https://doi.org/10.1117/12.2659121

KEYWORDS: Plasma generation, 3D equipment, Plasma, Photoresist materials, Chemistry, Oxygen, Emission spectroscopy

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Keywords/Phrases