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Chun Yen Liu
at Cadence Design Systems Inc
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Publications (1)
Proceedings Article | 26 May 2022 Poster + Paper
OPC optimization and hotspot detection using pattern diffing
Tsung-Wei Lin, Chun Yen Liu, Hung-Yu Lin, Mang-Shiun Chiang, Jason Sweis, Philippe Hurat, Chun Yen Liao, Chun-Sheng Wu, Chao-Yi Huang, Ya-Chieh Lai
Proceedings Volume 12052, 120521E (2022) https://doi.org/10.1117/12.2612476
KEYWORDS: Optical proximity correction, Image classification, Databases, Transistors, Semiconductor manufacturing, Reliability, Profiling, Manufacturing, Library classification systems, Integrated circuits
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