Dr. Claudia C. Delgado Simão Profile

Dr. Claudia C. Delgado Simão

Senior Scientist at EURECAT-Ctr Tecnològoc Catalunya

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Publications (4)

Proceedings Article | 27 March 2015 Paper

Mapping self-assembled dots and line arrays by image analysis for quantification of defect density and alignment

C. Simão, D. Tuchapsky, W. Khunsin, A. Amann, M. Morris, C. Sotomayor Torres

Proceedings Volume 9423, 942322 (2015) https://doi.org/10.1117/12.2085748

KEYWORDS: Image analysis, Statistical analysis, Scanning electron microscopy, Error analysis, Lithography, Optical alignment, Dimensional metrology, Silicon, Imaging arrays, Directed self assembly

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Proceedings Article | 25 June 2014 Paper

Nanoimprint-assisted directed self-assembly of low-molecular weight block copolymers: a route for 3D and multilevel nanostructures

C Simão, W. Khunsin, N. Kehagias, A. Francone, M. Zelsmann, M. Morris, C. Sotomayor Torres

Proceedings Volume 9083, 90832S (2014) https://doi.org/10.1117/12.2050181

KEYWORDS: Nanoimprint lithography, Nanostructures, Scanning electron microscopy, Silicon, Thin films, Annealing, Picosecond phenomena, Scattering, Silicon films, Directed self assembly

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Proceedings Article | 28 May 2014 Paper

Order and defectivity nanometrology by image processing and analysis of sub-20 nm BCPs features for lithographic applications

C. Simão, D. Tuchapsky, W. Khunsin, A. Amann, M. Morris, Clivia Sotomayor Torres

Proceedings Volume 9110, 91100R (2014) https://doi.org/10.1117/12.2050182

KEYWORDS: Annealing, Image analysis, Scanning electron microscopy, Error analysis, Lithography, Optical alignment, Statistical analysis, Picosecond phenomena, Silicon, Directed self assembly

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Proceedings Article | 2 April 2014 Paper

Defect analysis and alignment quantification of line arrays prepared by directed self-assembly of a block copolymer

C. Simão, D. Tuchapsky, W. Khunsin, A. Amann, M. Morris, C. Sotomayor Torres

Proceedings Volume 9050, 905028 (2014) https://doi.org/10.1117/12.2046075

KEYWORDS: Silicon, Statistical analysis, Image analysis, Scanning electron microscopy, Annealing, Polymers, Software development, Optical alignment, Picosecond phenomena, Directed self assembly

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