Prof. Czeslaw Lukianowicz Profile

Prof. Czeslaw Lukianowicz

Associate Professor at Politechnika Koszaliñska

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Proceedings Article | 10 August 2001 Paper

Direct and inverse problem in scatterometry of rough surfaces

Czeslaw Lukianowicz

Proceedings Volume 4517, (2001) https://doi.org/10.1117/12.435961

KEYWORDS: Light scattering, Scatterometry, Diffraction, Inverse problems, Scattering, Surface roughness, Fourier transforms, Inverse optics, Scatter measurement, Computer simulations

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Various optical methods are served for surface roughness measurements and have been applied for inspection of precise machined surfaces. These methods sometimes use scatterometry. Scatterometry of rough surfaces is based on scattering of light wave by surface irregularities. Essence of scatterometry consists of intensity and angular distribution of scattered light measurements. Scatter pattern is measured in one or two directions, depending on surface structure and its illumination. How will light be scattered from known irregular surface? It is the main question in direct problem of scatterometry. Research on dependence between measured distribution of scattered field and surface topography is the topic in inverse problem. Mathematical expression of this relation is based on various theories, primarily on the Rayleigh-Rice perturbation theory and on Kirchhoff theory. Direct and inverse problems in light scatter measurements of surface roughness are the subject of this paper. Theoretical and experimental studies of both these problems are presented. Computer techniques make possible to simulate and investigate direct and inverse problem for light scattering by rough surfaces. Investigations of both problems were carried on applying scalar Kirchhoff diffraction theory. Diffraction analysis of coherent light scattered from rough surface shows, that complex amplitude of light in Fraunhofer zone is proportional to two-dimensional Fourier transform complex amplitude of light in surface. Two-dimensional fast Fourier transform algorithm for computer simulation of diffraction field is applied. A discussion of modeling light scattered from periodical and random surfaces is also given.

Proceedings Article | 12 December 1994 Paper

Method of measuring small periodical movements involving laser interferometry

Tatiana Lukianowicz, Czeslaw Lukianowicz

Proceedings Volume 2340, (1994) https://doi.org/10.1117/12.195941

KEYWORDS: Mirrors, Interferometers, Error analysis, Laser interferometry, Semiconductor lasers, Beam splitters, Modeling, Amplifiers, Lamps, Signal detection

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In the paper, a description of a method of measuring little periodical movements involving laser interferometer is presented. The principle of this method is to use vibration table during contact verification instruments. The table is activated by periodical signal. All the movements of the table are measured by laser interferometer. Measurements of table movements are obtained thanks to interferogram which shows particular states of the table. Theoretical basis and measurement errors analysis of this method are presented in the paper. The measuring system, which has been worked out, consisting of vibration table, laser interferometer and measuring signal transforming unit is also described. During the studies its field of application has been defined. Comparative studies and practical tests have proved the effectiveness of the system. The research stand makes it possible to measure displacements of the mobile element of a vibration table, which can perform oscillations from 0.1 Hz to 500 Hz frequencies. Harmonic vibrations amplitude range is from 0.15 micrometers to 7.5 micrometers for vibration frequencies lower than 50 Hz. For vibrations of frequencies higher than 50 Hz, the lower limit of measuring amplitudes range is 0.15 micrometers and the upper limit of this range decreases with vibration frequencies increase. Displacements measuring error in harmonic movements depends mainly on laser light wavelength reproducing error and on interference signal measuring errors. While using the worked out method one more error appears. It arises from not performing Abbe's postulate. Value of displacement measuring relative error in this method does not exceed 3% and it decreases with vibration amplitude increase. Value of this error can be decreased by appropriate vibration table amplitude setting.

Proceedings Article | 31 October 1994 Paper

Optical instrument for evaluation of rough machined-surface by angular distribution of scattered light

Czeslaw Lukianowicz

Proceedings Volume 1991, (1994) https://doi.org/10.1117/12.192017

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In this paper a method and an instrument worked out for evaluating roughness of machined surfaces are presented. The main idea of the method is to light up surface by laser beam and then to record an angular distribution of intensity of scattered light. Based on angular distribution of scattered light some parameters and characteristics of surface roughness are determined. This instrument can be used for measurements of flat and rotary surfaces. The application of the instrument is in the fields of full automatic testing, nondestructive testing and continuous process control.

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