Dr. Da Yang Profile

Dr. Da Yang

at Cornell Univ

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Publications (2)

Proceedings Article | 4 May 2005 Paper

Materials for future lithography

Seung Wook Chang, Da Yang, Junyan Dai, Nelson Felix, Daniel Bratton, Kousuke Tsuchiya, Young-Je Kwark, Juan-Pablo Bravo-Vasquez, Christopher Ober, Heidi Cao, Hai Deng

Proceedings Volume 5753, (2005) https://doi.org/10.1117/12.607235

KEYWORDS: Glasses, Line edge roughness, Extreme ultraviolet lithography, Electron beam lithography, Lithography, Extreme ultraviolet, Polymers, Silicon, Chemical elements, Molecules

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Proceedings Article | 19 January 2005 Paper

The convergence of top-down and bottom-up nanofabrication: formation of 3D structures

Da Yang, Junyan Dai, Mingqi Li, Christopher Ober

Proceedings Volume 5592, (2005) https://doi.org/10.1117/12.580239

KEYWORDS: Lithography, Electron beam lithography, X-ray lithography, Etching, X-rays, Absorption, Resistance, Extreme ultraviolet lithography, Ion beam lithography, Electrons

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