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Dachen Chu
at Stanford Univ
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Publications (1)
Proceedings Article | 16 July 2002 Paper
Modeling resist heating in mask fabrication using a multilayer Green's function approach
Dachen Chu, R. Fabian Pease, Kenneth Goodson
Proceedings Volume 4689, (2002) https://doi.org/10.1117/12.473459
KEYWORDS: Chromium, Diffusion, Interfaces, Mask making, Edge roughness, Mathematical modeling, Quartz, Distortion, Thermal modeling, Electron beams
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