Dr. Dandan Han Profile

Dr. Dandan Han

at Univ. of Chinese Academy of Sciences

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Publications (2)

Proceedings Article | 20 November 2024 Poster + Paper

Quantitative analysis of field intensity distribution effects on patterning results in laser direct writing lithography

Wei Zhao, Dandan Han, Yayi Wei

Proceedings Volume 13216, 1321626 (2024) https://doi.org/10.1117/12.3034616

KEYWORDS: Lithography, Imaging systems, Homogenization, Microlens array, Microlens, Beam shaping, Optical lithography, Laser applications

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Proceedings Article | 9 April 2024 Poster + Paper

A novel kinetic framework-based multiscale modeling of spatial atomic layer deposition process

Sen Deng, Hua Shao, Dandan Han, Rui Chen, Yayi Wei

Proceedings Volume 12958, 129580Q (2024) https://doi.org/10.1117/12.3010331

KEYWORDS: Atomic layer deposition, Molecules, Silicon, Deposition processes, Process modeling, Modeling, Vacuum chambers, Silicon films, Silicon nitride

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