The choice of materials for use in biomedical applications is a very important issue. In addition to technological capabilities, attention should be paid to the biocompatibility of the material with the surrounding tissues. The paper presents a list of materials that can be used in BioMEMS devices. On the basis of Stensaas research, the materials were divided into non-reactive, reactive and toxic ones. The impact of given metals on living organisms and the possible negative effects they may cause is discussed. The methods of material selection and decision-making criteria were presented.
The article is devoted to measuring matrices that can be used to determine the impact of a given material on a biological substance in BioMEMS devices. The focus is on the use of the ECIS system. The test consists in measuring the impedance of cells through which a low-current current is passed. As part of the conducted research, based on the commercial matrixes of the ECIS system, special test plates were designed and made on a biocompatible polycarbonate substrate. Titanium, nichrome, nickel and copper were used. The first measurements characterizing the structures made were carried out.
The article presents the construction and technology of comb capacitors on a polycarbonate substrates. The structures have been designed to be used in the ECIS measurement system that allows monitoring the activity of the examined cells by analyzing the changing electrical parameters impedance, resistance and capacitance in real time. The copper layer was embedded by sputtering method. The resulting comb capacitors were used in a test sample of substances with different chemical properties.
This paper presents the design and simulation of four different structures of nichrome microheater on the polycarbonate substrate. Nichrome layer is covered by the silicon nitride dielectric layer. The comb capacitor covering dielectric layer is used for measuring electrical parameters of liquids. Designed structure allows impedance, resistance and capacitance monitoring of studied substances like chemical or biological liquids, which require constant heating value on the substrate surface. 3D model design and electro-thermal finite elements simulations were carried out by CoventorWare software. Various shapes of the heaters were studied to check the uniformity heating on the active surface.
This paper presents issues related to the creation of research plates with titanium electrodes, which are a new alternative to currently used plates with gold electrodes. Methods for obtaining metallization of titanium, necessary for the production of electrodes are described. Various lithography techniques are presented for processing the obtained layer of the material. The stages of designing and manufacturing comb capacitors and ready-made research plates have been presented. Finally, substrates with a titanium layer have been designed and manufactured to allow the impedance of living cells to be measured.
Access to the requested content is limited to institutions that have purchased or subscribe to SPIE eBooks.
You are receiving this notice because your organization may not have SPIE eBooks access.*
*Shibboleth/Open Athens users─please
sign in
to access your institution's subscriptions.
To obtain this item, you may purchase the complete book in print or electronic format on
SPIE.org.
INSTITUTIONAL Select your institution to access the SPIE Digital Library.
PERSONAL Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.