Mr. Denis Jung Profile

Denis Jung

at Fraunhofer-Institut für Photonische Mikrosysteme

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Publications (2)

Proceedings Article | 16 February 2012 Paper

Vertical comb drive microscanners for beam steering, linear scanning, and laser projection applications

Denis Jung, Thilo Sandner, David Kallweit, Harald Schenk

Proceedings Volume 8252, 82520U (2012) https://doi.org/10.1117/12.906690

KEYWORDS: Mirrors, Semiconducting wafers, Electrodes, Wafer bonding, Scalable video coding, Scanners, Beam steering, Micromirrors, Laser applications, Instrument modeling

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Proceedings Article | 24 February 2009 Paper

Fabrication of 3D comb drive microscanners by mechanically induced permanent displacement

D. Jung, D. Kallweit, T. Sandner, H. Conrad, H. Schenk, H. Lakner

Proceedings Volume 7208, 72080A (2009) https://doi.org/10.1117/12.808210

KEYWORDS: Semiconducting wafers, Electrodes, Mirrors, Scalable video coding, Adhesives, Solids, Oxides, Silicon, Aluminum, Etching

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