Ferrule-top (FT) cantilevers are a new generation of all optical micromechanical sensors obtained by carving
microstructures on the top of ferrule terminated fibers. In this paper, we will demonstrate how this plug and play design
can be used for the development of a new generation of sensors and actuators for harsh environments, where
commercially available devices would be prone to failure. Ferrule-top sensors can work in two main modes - static and
dynamic. The static mode is based on recording elastic deflection of the cantilever; the dynamic mode relies on tracking
changes in its mechanical properties (resonance frequency, quality factor). Depending on the application, one can choose
which mode is most suitable or combine both to achieve best performance. We will illustrate the relation between
specific measured quantity (humidity, flow) and the behavior of the sensor. Further, we will show the setup in which the
sensor can be actuated using light, giving the possibility to excite the cantilever without any electronics on the sensing
head. This technique might by use for the development of fully optical beamsteering microdevices.
KEYWORDS: Near field scanning optical microscopy, Atomic force microscopy, Near field optics, Optical microscopy, Imaging systems, Photodiodes, Atomic force microscope, Liquids, Transmittance, Optical fibers
Fiber-top and ferrule-top cantilevers (FTC) are a new generation of all optical, monolithic, self-aligned microdevices.
They are obtained by carving a cantilever on the cleaved end of an optical fiber (fiber-top) or on a ferrule terminated
fiber (ferrule-top). FTCs rely on Fabry-Perot interferometry to measure the deflection of the cantilever with
subnanometer deflection sensitivity. FTCs specially developed for scanning probe microscopy are equipped with a sharp
tip that has the dual function of probing the topography and collecting/emitting light. We perform the scanning probe
microscopy using these probes in air, liquid and at low temperature (12°K). The light emission/collection functionality of
FTC probes also allows one to combine scanning near field optical microscopy (SNOM) and optical transmission
microscopy with contact and non-contact mode atomic force microscopy (AFM). This makes FTCs ideal for
AFM+SNOM on soft samples, polymers and biological specimen, where bent fiber probes and tuning fork based
systems would not be recommended because of the high stiffness of those probes. We demonstrate here the capability of
fiber-top cantilevers to measure deflection and collect near field optical signal, and also the capability of ferrule-top
cantilevers for simultaneous optical transmission microscopy and topography of SNOM gratings. Thanks to their unique
features, FTCs also open up possibilities for UV nanolithography and on-demand optical excitation at nanoscale.
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