Mr. Dmitriy Sergeevich Seregin Profile

Dmitriy Sergeevich Seregin

at MIREA - Russian Technological Univ.

SPIE Involvement:

Author

Publications (2)

Proceedings Article | 31 January 2022 Paper

A. Rezvanov, A. Miakonkikh, A. Vishnevskiy, D. Seregin, K. Vorotilov, K. Rudenko, M. Baklanov

Proceedings Volume 12157, 1215716 (2022) https://doi.org/10.1117/12.2624608

KEYWORDS: Plasma, Etching, Dielectrics, Carbon, Resistance, Refractive index, Fluorine, Annealing, Argon, Chemical species

Proceedings Article | 15 March 2019 Paper

D. Abdullaev, D. Seregin, D. Zubov, K. Vorotilov

Proceedings Volume 11022, 110221B (2019) https://doi.org/10.1117/12.2520548

KEYWORDS: Reactive ion etching, Ferroelectric materials, Dielectric polarization, Etching, Dielectrics, Annealing, Ion beams, Thin films, Dry etching

UPDATE YOUR PROFILE

Is this your profile? Update it now.

Don’t have a profile and want one?

Create an account on SPIE.org

Keywords/Phrases