Dr. Doo-Hyun Cho Profile

Dr. Doo-Hyun Cho

at Samsung Electronics Co Ltd

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Publications (2)

Proceedings Article | 22 February 2021 Presentation + Paper

High-speed wafer film measurement with heterogeneous optical sensor system

Doo-Hyun Cho, Seung Beom Park, Sung-Ha Kim, Taejoong Kim, Kwangsung Lee

Proceedings Volume 11611, 116110H (2021) https://doi.org/10.1117/12.2584200

KEYWORDS: RGB color model, Semiconducting wafers, Data modeling, Optical sensors, Optical testing, Hyperspectral imaging, Sensor fusion, Principal component analysis, Metrology, Instrument modeling

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Proceedings Article | 21 August 2020 Presentation + Paper

Vision-based high speed wafer film thickness profile estimation with nonlinear regression

Doo-Hyun Cho, Hyounggon Kim, Jaehyeon Son, Sung-Ha Kim, Taejoong Kim, Kwangsung Lee

Proceedings Volume 11500, 115000K (2020) https://doi.org/10.1117/12.2566426

KEYWORDS: Data modeling, Semiconducting wafers, Metrology, Image processing, General packet radio service, Visual process modeling, Sensors, Chemical mechanical planarization, RGB color model

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